Manufacturer: AMAT

  2. AMAT E500

    High Current Implanters

    AMAT E500

    › Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP› OEM Serial ID?ES193741 U2› Completeness: Total/partial/Donor tool? Please list missing parts.Total› Date of first usage?NA› Technic special customized for Infineon?NA› Correct maintained?Yes› Any damages/deficits known?No› Manuals existing?No› Crated: If yes…/ professional with protocol / partly / simple?No› Detailed Configuration/Specification of the tool › Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS› Useable for which products?8"  Thin Taiko wafers› Wafer size (if applicable)?200mm› Any consumables at end of lifetime?Yes (source, electrode)› Procured from OEM or from second hand?From IR Singapore› Any refurbishments done?No› Was there a significant system failure in the last three years?No› Any contaminations known?BF3, H2› IFX inventory200016809location INFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM
  3. AMAT HDP Centura (#611)

    Cluster PECVD Tools

    AMAT HDP Centura (#611)

    Software: Win 10 ; OR 4000 WTM Controller; 3x ENI Generator Racks, Chiller INR-498-011D; 2x Remote Monitor; High Density Plasma Process; Process Chambers: A,B,D; Orienter chamber F;Software: Win 10 ; OR 4000 WTM Controller; 3x ENI Generator Racks, Chiller INR-498-011D; 2x Remote Monitor; High Density Plasma Process; Process Chambers: A,B,D; Orienter chamber F;

  5. AMAT Centura Hart

    Cluster Plasma Tools - Silicon

    AMAT Centura Hart

    Tool located in cleanroom, working for its purpose und complete. 

    Mainframe with 4 chambers. Equipment has Special VITA-Controller-Licence-Requirements.Sale only as single Parts (Chamber/Mainframe) due to limited space for deinstallationProcessANISOTROPProcedureCUBV

  6. AMAT Centura Hart

    Cluster Plasma Tools - Silicon

    AMAT Centura Hart

    Tool located in cleanroom, working for its purpose und complete. 

    Mainframe with 4 chambers. Sale only as single Parts (Chamber/Mainframe) due to limited space for deinstallationProcessANISOTROPProcedureCUBV

  12. EPI Centura ACP 300mm "Yu Shan"

    Epitaxial Cluster Tools

    EPI Centura ACP 300mm "Yu Shan"

    Brand new and unused EPI Centura ACP 300 mm

    4 Chambers;  Chamber code RH3, Lamp type BNA8 R3 Mainframe Configuration E4 Single, 4 Facet SC ENP BLK2, Loadport AMAT Standard 300mm, EPI Water Module LT Design. RP EPI

    Tool out of Project: "Yu Shan"

    The original rough IFX Equipment procurement value was ~10,3 M€

    Will be now sold for an attractive price.

     Equipment is... 

    ...brand new 

    ...never used  

    ...original packaged and crated 

    ...located in Asia 

    ...complete and fully functional 

    ...professional stored in Warehouse