DNS NANOSPRAY

Atomic Force Microscope (AFM) An Atomic Force Microscope (AFM) measures topography, feature size, defects, and properties of solid surfaces. The Dimension X AFM provides depth metrology solutions.

Available from October 1st. An earlier start date may be possible upon mutual agreement.

Available from October 1st. An earlier start date may be possible upon mutual agreement.

 The system is equipped with 6-Inch Bernoulli handling with Pinlesschuck (with centering pins); Exhaust up,

Heat exchangers: 2x double Hex with Lauda (Medium 1 and Medium 3), ??1x single Hex with Lauda (Medium 2); modification to allow the chemical cabinets to be located above the system with intermediate tank; FFU: A fan or fan-controller is not working; The Hardware of a Measuring system is installed, but no Software;

Mainunit Software: Major Version 117 / Minor Version 2015.08.21 / GEM Version GEM5.8

       Chemistry: 3 cabinets with SEZ DOS Software; The PC is repaired

            Chemistry cabinet 1: with Buffertank and Maintank

Chemistry cabinet 2: with Buffertank and Maintank, but we never use the Buffertank; the Drain of the cabinet 2 is repaired

Chemistry cabinet 3: with Buffertank and Maintank, but without Bufferpump and we never use the Chemistry cabinet 3 for the prozess

• dismantling date: We can dismantle the tool in 2027 (according to process engineering);
• Expected date of availability for the buyer: 2027

available: now

ATM EPI AMAT CENTURA HTF Tool with 3 Process chambers

available: now

available: now

DFS8960 surface planer

Disconnected from the facility lines on the grey room  

available: now

available: now

available: now