Production Equipment
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Other Wafer Production Equipment
MX204-2D
Available from October 1st. An earlier start date may be possible upon mutual agreement.
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Other Wafer Production Equipment
MX204-1C
Available from October 1st. An earlier start date may be possible upon mutual agreement.
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Other Wafer Production Equipment
SP203 with 3 Chemistry cabinets
The system is equipped with 6-Inch Bernoulli handling with Pinlesschuck (with centering pins); Exhaust up,
Heat exchangers: 2x double Hex with Lauda (Medium 1 and Medium 3), ??1x single Hex with Lauda (Medium 2); modification to allow the chemical cabinets to be located above the system with intermediate tank; FFU: A fan or fan-controller is not working; The Hardware of a Measuring system is installed, but no Software;
Mainunit Software: Major Version 117 / Minor Version 2015.08.21 / GEM Version GEM5.8
Chemistry: 3 cabinets with SEZ DOS Software; The PC is repaired
Chemistry cabinet 1: with Buffertank and Maintank
Chemistry cabinet 2: with Buffertank and Maintank, but we never use the Buffertank; the Drain of the cabinet 2 is repaired
Chemistry cabinet 3: with Buffertank and Maintank, but without Bufferpump and we never use the Chemistry cabinet 3 for the prozess
- dismantling date: We can dismantle the tool in 2027 (according to process engineering);
- Expected date of availability for the buyer: 2027
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Other Wafer Production Equipment
ATM EPI AMAT CENTURA HTF
ATM EPI AMAT CENTURA HTF Tool with 3 Process chambers
available: now
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Other Wafer Production Equipment
Ofen V01B
Disconnected from the facility lines on the grey room
available: now
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