Equipment according the age in good in good shape,

however only one wafer stage is currently working 

2003: "ASML's new generation TWINSCAN system patterns for 65 nm node"

Equipment inspection virtual or physical possible

AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet, 4 Coater and 4 Developer

Last Time in production: 5/5/25

ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3

Exposure Tool still in production, located in cleanroom

Excimer Laser type: CYMER XLA165

no missing parts

T/H controller 1 to 3 need service/repair

last time in production 10.1.2024

ACT8 DB System, 2 BCT, 2 COT, 3 DEV, 3 CHP, 1WEE, 10LHP, 2 ADH, 4 HHP, CWD, 

The Tool is complete and is working, full usage for its purpose. Electronical manual exists. Located in cleanroom. ProcessUV-HardenProcedureEXP

The Tool is complete and is working, full usage for its purpose. Electronical manual exists. Located in cleanroom. ProcessUV-HardenProcedureEXP

- console at boxed PC with touch 

- NIKON Reticle Changer

- I Line Exposure, x5, 6 inch Reticle, NA 0.63, Cluster Modus Inline

- boxed PC for windows XP need to be rebuild by buyer

ELCM tool for RESTMK715

ELCM tool for RESTMK708 

CANON stepper ECDCAN401 ELCM

CANON stepper EXPCAN408 ELCM