Wafer Fabrication Equipment

  1. CAI519 Canon FPA 3000 i5+

    Wafer Steppers: I-Line

    CAI519 Canon FPA 3000 i5+

    Canon FPA 3000 i5+

    General Configuration:

    • FPA 3000 - i5(+)
    • Manufactured in  June / 1997
      • 8“ Wafer Chuck, Notch PA unit
      • 6“ Nikon-type Reticle Changer
      • Reticle Barcode-Reader =   yes
      • Cassette Barcode Reader = yes
      • Pellicle Particle Checker =   yes
      • Online - ESPA =   yes
      • Interface type:   right
      • Standard flys eye lens
      • Chamber type: CD80
  2. ASML-AT1250 DUV193nm

    Other Lithography Equipment

    ASML-AT1250 DUV193nm

    Equipment according the age in good in good shape,

    however only one wafer stage is currently working 

    2003: "ASML's new generation TWINSCAN system patterns for 65 nm node"

    Equipment inspection virtual or physical possible

  4. CANON FPA 3000 I4 (510-x87)

    Wafer Steppers: I-Line

    CANON FPA 3000 I4 (510-x87)

    - console at boxed PC with touch 

    - NIKON Reticle Changer

    - I Line Exposure, x5, 6 inch Reticle, NA 0.63, Cluster Modus Inline

    - boxed PC for windows XP need to be rebuild by buyer

  7. Nexx Apollo PVD

    Horizontal Sputterers

    Nexx Apollo PVD

    The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafers. It uses a staged vacuum system that allow short pump down time to achieve ultra high vacuum. The multi chamber design allows for precise control over all process parameters.

  10. VIIsta 3000XP - HE14 / (IMPV14-01) - Implanter 300mm

    High Current Implanters

    VIIsta 3000XP - HE14 / (IMPV14-01) - Implanter 300mm

    Available: Immediately

    The equipment is currently still in warm SteelTypeVIIsta 3000XPWafersize300mmCE MarkYesConnection top/bottomtopLabel KitGerman

  11. Axcelis NV8250HT #941

    Medium Current Implanters

    Axcelis NV8250HT #941

    Equipment Konfiguration: Type:NV8250HTEnergy Config:0 - 250Kv MidcurrentSerialnumber:908Build Year:2002Date of first usage:buyed new from vendorCurrent Condition: GoodCE-Conformity:YesLocation:greyroomVoltage:208VCryo-Pumps:3x CTI/Edwards Onboard: OB-8Cryo-Kompressor:CTI 9650 Low-VoltageTurbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003CRough-Pumps:Edwards: without QDP40, not includedEndstation Rough-Pump:not includedWafersize:8inch(200mm)Clamp-Type:E-Chuck green with Non-µC ControllerWafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)Gasbox:Modular 5-String, 4x 2,0L SizeString1:Argon Carriergas; MFC Unit-1662 2sccm BF3String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3Beam-Profiler Type:Belt-DriveGear-Type's:Scan: Planetary  Tilt: PlanetarySource-Type:ELS4 IHC-Source without VaporizerHV-Transformer:Silicon-OilLight-Tower:red/yellow/green; no buzzerMain-WorkstationSolaris SUN AXI 4HE PH: 200978Second-WorkstationSolaris SUN Sparc5Software-Version:5.1.4.1Network:24port 100MB Ethernet with Cisco Router-KitCell-Controller:177 TypeNotes:Upper-Rack Panel missing Clean-Room Table missing on frontside all 4 wheels on oil-isolation transformer are broken Minor modifications on tool No Manual-Set/ no Spares include tool was used 24/7 full in production between 15 and 230kv Energy If required, tool can be inspected on site, but no Power

Popular Manufacturers

AMAT Applied Materials Varian Canon LAM Research Corp. Tepla Axcelis Technologies ASM Fusion Systems Inc. Microcontrol