Equipment according the age in good in good shape,

however only one wafer stage is currently working 

2003: "ASML's new generation TWINSCAN system patterns for 65 nm node"

Equipment inspection virtual or physical possible

AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet, 4 Coater and 4 Developer

Last Time in production: 5/5/25

ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3

The Tool is complete and is working, full usage for its purpose. Electronical manuel exists. Located in cleanroom. ProcessUV-HardenProcedureEXP