Completeness partial

- Z80 missing

- Tool is EOL

Completeness partial

- Z80 missing

- CDS not running

- Tool is EOL

WET Clean Strip (8''tool), Currently the tool still working.

WET Clean Strip (8''tool)

Used Configuration:

Tank 1: EKC

Tank 2: P1331

Tank 3 and 4: DMF

Tank 5: IPA

Known errors:

Filter from tank 4 is leaking

Heater 1 from tank 4 is broken

Heater 3 from tank 4 is broken

The tool is working, in good condition and located in clean room

no missing parts

Glass clean

SP304 Mainunit: The system is equipped with 8-inch Bernoulli handling, Frontside and Backside (implemented by PTW) with Pinlesschuck and Pinchuck; Cold DI in Nozzle; Hot DI in Dispenser; exhaust up; heat exchangers: 1x double hex with Lauda for Di, 1x double hex with Lauda for Medium 2; 1x single hex with Lauda for Medium 1 (not used), 1x single hex with Lauda for Medium 3;

Chemistry: 2 cabinets with Maintank and Buffertank and with Mixtank with 3 Paddle wheels to fill and with Pressure regulator for the facility lines; with a Drainpumpstation.

Problems: Chemistry cabinets are used; some parts in the tool are corroded; the tool has been repaired and converted to Bernoulli handling by PTW; software adjustments have been made.

Wafer Size Range:

Minimum: 200mm

Maximun: 200mm

Set Size: 200mm

• No Spare Parts available
• dismantling date: We can dismantle the tool in June 2026 
• Expected date of availability for the buyer: August 2026

Toolcontroller with Windows XP

Remote controller

Ready for endpointdetection system

Process: Copper / Titan-Wolfram / dHF (dilluted HF)

div. spareparts possible (negotiable)