3 Chambers, the tool is working and is located in cleanroom

Procedure: FCG-TEOSLF Generator 3x

P500054

Etchtool with 2 Chambers.

Tool located in cleanroom, needs repair and complete. Mainframe with 4 chambers.ProcessANISOTROPProcedureTRENCH

Tool located in cleanroom, working for its purpose und complete. 

Mainframe with 4 chambers. Equipment has Special VITA-Controller-Licence-Requirements.Sale only as single Parts (Chamber/Mainframe) due to limited space for deinstallationProcessANISOTROPProcedureCUBV

Tool located in cleanroom, working for its purpose und complete. 

Mainframe with 4 chambers. Sale only as single Parts (Chamber/Mainframe) due to limited space for deinstallationProcessANISOTROPProcedureCUBV

Pictures are from parallel tool!

Applied Material P5000XT

-top mount elektronics and He backing

-2 Chamber Narrow Gap tool

-installed pos. Chamber A/B

-Standard Phase 3 Robot

-15 slot storage elevator

-ZA Slit Valves pos. A/B

-Wafer Positioning Sensor (WPS)

-Cassette loadport with 2 stages

-2 Monitor

-System SSD

-CF card Floppy emulator

-MXP Unibody chamber with Narrow Gap lid

-Turbo Seiki STP-301CVB

-Controller Seiki SCU-350D

-MKS Manometer

-7 Gas Sticks / Brooks GF 100 MFCs

-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

-2x ENI OEM 12B RF generators

-AC Box at RF Rack

The system was installed in July 2021, switched to warm steel mode in July 2024, and to cold steel mode in January 2025. It was therefore in operation for only 3 years and is consequently in very good condition. However, only one preventive maintenance (PM) has been performed since installation, so it is possible that some of the O-rings are worn.

without UI computer, cooler, generator rack and vacuum pump

process gases: Argon, CF4, CHF3, O2, CO, SF6, N2

TEPLA 300 PC autoload in good condition

TEPLA 300 PC autoload in good condition

TEPLA 300 PC autoload in good condition

Fusion Gemini GPL in good condition

available: End of  March 2027