Available: Immediately 

Available: Immediately

The equipment is currently still in warm SteelTypeVIIsta 3000XPWafersize300mmCE MarkYesConnection top/bottomtopLabel KitGerman

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks

Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process; Process Chambers: A,B,C; Orienter chamber F

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks, Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process

Process Chambers: A,B,C

Orienter chamber F

System: 1x Mainframe

3x process chamber

1x Controller Rack

1x Chiller

3x ENI Generator Racks (Converted to separate water supply each Generator)

1x Controller Rack

x Chiller

3x ENI Generator Racks (Converted to separate water supply each Generator)

AMAT Vita/Delphin Controller

Tool will be sold without Software

Automatic Indexer CH.1: Al ESC (MCA+) Ch.2: Al ESC (MCA+) Ch.3: Durasource TTN Ch.4: Durasource TTN Ch.F: Orienter/Degas EI: HSMS

Current condition: very good Usage 24/7

Deinstallation earliest Nov26

Process: ANISOTROP

Procedure: TRENCH

Mainframe with 4 chambers. Equipment has Special VITA-Controller-Licence-Requirements

10.09.2024 Vita- Upgrade

Pictures are from parallel tool!

Applied Material P5000XT

-top mount elektronics and He backing

-2 Chamber Narrow Gap tool

-installed pos. Chamber A/B

-Standard Phase 3 Robot

-15 slot storage elevator

-ZA Slit Valves pos. A/B

-Wafer Positioning Sensor (WPS)

-Cassette loadport with 2 stages

-2 Monitor

-System SSD

-CF card Floppy emulator

-MXP Unibody chamber with Narrow Gap lid

-Turbo Seiki STP-301CVB

-Controller Seiki SCU-350D

-MKS Manometer

-7 Gas Sticks / Brooks GF 100 MFCs

-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

-2x ENI OEM 12B RF generators

-AC Box at RF Rack

Equipment is under good condition (w/ 3 chambers)

Currently inside the cleanroom environment; under idle/warm down condition

The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.

Tool facts:

Applied Material P5000XT

-top mount elektronics and He backing

-2 Chamber Narrow Gap tool

-installed pos. Chamber A/B

-Standard Phase 3 Robot

-15 slot storage elevator

-ZA Slit Valves pos. A/B

-Wafer Positioning Sensor (WPS)

-Cassette loadport with 2 stages

-2 Monitor

-System SSD

-CF card Floppy emulator

-MXP Unibody chamber with Narrow Gap lid

-Turbo Seiki STP-301CVB

-Controller Seiki SCU-350D

-MKS Manometer

-7 Gas Sticks / Brooks GF 100 MFCs

-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

-2x ENI OEM 12B RF generators

-AC Box at RF Rack

IFX Tool Code: MS11 

AMAT/Varian E500HP (Midcurrentimplant) 

 Available: March, 2026 

no Chuck, no PSUs, No Evs

beside this complete

no ESC, no PSUs, No Evs, no MFS´s,

No whole lower assambly where the ESC is installed

beside this complete