Other Wafer Production Equipment

  4. SP203 with 3 Chemistry cabinets

    Other Wafer Production Equipment

    SP203 with 3 Chemistry cabinets

     The system is equipped with 6-Inch Bernoulli handling with Pinlesschuck (with centering pins); Exhaust up,

    Heat exchangers: 2x double Hex with Lauda (Medium 1 and Medium 3), ??1x single Hex with Lauda (Medium 2); modification to allow the chemical cabinets to be located above the system with intermediate tank; FFU: A fan or fan-controller is not working; The Hardware of a Measuring system is installed, but no Software;

    Mainunit Software: Major Version 117 / Minor Version 2015.08.21 / GEM Version GEM5.8

           Chemistry: 3 cabinets with SEZ DOS Software; The PC is repaired

                Chemistry cabinet 1: with Buffertank and Maintank

    Chemistry cabinet 2: with Buffertank and Maintank, but we never use the Buffertank; the Drain of the cabinet 2 is repaired

    Chemistry cabinet 3: with Buffertank and Maintank, but without Bufferpump and we never use the Chemistry cabinet 3 for the prozess

    • dismantling date: We can dismantle the tool in 2027 (according to process engineering);
    • Expected date of availability for the buyer: 2027

Popular Manufacturers

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