SP203 with 3 Chemistry cabinets
The system is equipped with 6-Inch Bernoulli handling with Pinlesschuck (with centering pins); Exhaust up,
Heat exchangers: 2x double Hex with Lauda (Medium 1 and Medium 3), ??1x single Hex with Lauda (Medium 2); modification to allow the chemical cabinets to be located above the system with intermediate tank; FFU: A fan or fan-controller is not working; The Hardware of a Measuring system is installed, but no Software;
Mainunit Software: Major Version 117 / Minor Version 2015.08.21 / GEM Version GEM5.8
Chemistry: 3 cabinets with SEZ DOS Software; The PC is repaired
Chemistry cabinet 1: with Buffertank and Maintank
Chemistry cabinet 2: with Buffertank and Maintank, but we never use the Buffertank; the Drain of the cabinet 2 is repaired
Chemistry cabinet 3: with Buffertank and Maintank, but without Bufferpump and we never use the Chemistry cabinet 3 for the prozess
- dismantling date: We can dismantle the tool in 2027 (according to process engineering);
- Expected date of availability for the buyer: 2027
1 unit @ Best Price
CATEGORY: Other Wafer Production Equipment
Villach, Austria
SPECS
| Model | SP203-Bh8-R/BH6 |
| Description | SP203 with 3 Cabinets (+Modifications) |
| Wafer Size Range | |
| Minimum | 150 mm |
| Maximum | 150 mm |
| Set Size | 150 mm |
| Accessories |
|
| Extended Description | Details at Description RST22c.docx |
| Condition | Poor |
| Year of Manufacture | 1999 |
| Power Requirements | Other V 40.0 A 50/60 Hz 3 Phase |