ITEM ID: 268764

AMAT Endura HP PVD

It’s an AMAT Endura 5500 HP PVD Tool. Equipped with 2 Degas-Orienter, one Preclean II Chamber, 3 Narrow Body PVD Chambers and two Wide-Body PVD Chambers. For 6’’ Wafersize.

The Tool has been upgraded to a Vita Controller in March 2023.

1 unit @ Best Price

MAKE: Applied Materials

MODEL: Endura 5500 SPUT50

Villach, Austria

SPECS

Manufacturer Applied Materials
Model Endura 5500 SPUT50
Wafer Size Range
Minimum 150 mm
Maximum 200 mm
Set Size 150 mm
Accessories

2 LoadLocks

2 Orienter

1 Preclean II

3 Narrow Body PVD Chambers

2 Wide Body PVD Chambers

2 HP+ Robot

2 MDX-L18M Supplies

1 MDX-L6 Supply

1 MDX-L12M Supply

1 RF - Supply 13,56 MHZ, 1000 W

1 RF - Supply 400 KHZ (LF10A)

6 1kV DC Bias Supply (2 in Generator Rack, 4 in Stock)

1 Turbo Controller Turbotronic NT 150/360

1 Systempump Connection Board

3 Cryocompressor with Motor Control

3 ESC Chucks 6’’

The following Parts are excludet from sale:
15V and 24V Power Supplies

RGAs

1 Pinnacle 3 Power Supply

1500V ESC Cable and Supply

Hard Disk and Dongle from Vita Upgrade

Cryo Network Controller

Wafer Detection from CH B

Cryo Flexlines

Power Requirements 380 V 50/60 Hz 3 Phase
CE Marked YES
Year of Manufacture 1996
Condition Fair

S&H

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

Payment

100% downpayment