Canon FPA 3000 i5+

General Configuration:

• FPA 3000 - i5(+)
• Manufactured in  June / 1997
  • 8“ Wafer Chuck, Notch PA unit
  • 6“ Nikon-type Reticle Changer
  • Reticle Barcode-Reader =   yes
  • Cassette Barcode Reader = yes
  • Pellicle Particle Checker =   yes
  • Online - ESPA =   yes
  • Interface type:   right
  • Standard flys eye lens
  • Chamber type: CD80

300mm + LITVC1-02

Sale without Clean track Act12 possible. Can be seperated.

- console at boxed PC with touch 

- NIKON Reticle Changer

- I Line Exposure, x5, 6 inch Reticle, NA 0.63, Cluster Modus Inline

- boxed PC for windows XP need to be rebuild by buyer

CANON stepper ECDCAN401 ELCM

CANON stepper EXPCAN408 ELCM

no missing parts, no damage