Equipment according the age in good in good shape,

however only one wafer stage is currently working 

2003: "ASML's new generation TWINSCAN system patterns for 65 nm node"

Equipment inspection virtual or physical possible

Süss Micro Tec ACS200 Gen 3

AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet, 4 Coater and 4 Developer

Last Time in production: 5/5/25

ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3

The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafers. It uses a staged vacuum system that allow short pump down time to achieve ultra high vacuum. The multi chamber design allows for precise control over all process parameters.

3 DXZ/CXZ Chambers for Centura/P5000 Mainframe is transport rack 

-Back end medium current Implanter

- 100002956  

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks

Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process; Process Chambers: A,B,C; Orienter chamber F

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks, Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process

Process Chambers: A,B,C

Orienter chamber F

System: 1x Mainframe

3x process chamber

1x Controller Rack

1x Chiller

3x ENI Generator Racks (Converted to separate water supply each Generator)

1x Controller Rack

x Chiller

3x ENI Generator Racks (Converted to separate water supply each Generator)

AMAT Vita/Delphin Controller

Tool will be sold without Software

SP203 Mainunit: 6 Inch Bernoulli Handling; Pinlesschuck 6 Inch; Exhaust Up; 1 Medium Double Hex; 2 Medium Single Hex; Software: Major Version 117; Minor Version 2015.08.21; Gem Version GEM 5.8;

3 Chemistry Cabinetts: Cabinett 1: Maintank and Buffertank; Cabinett 2: Maintank and Buffertank; Cabinett 3:

Maintank; Chemistry Controller-Dos

Wafer Size Range

Minimum: 150 mm

Maximum:150 mm

Set Size: 150 mm

Problems: Keyboard switching; voltage fluctuations; chemistry-cabinets heavily used; chemistry computer not original; modifications; FFU controller; 1 cabinet drain box repaired;

• No Spare Parts available
• dismantling date: We can dismantle the tool in May 2026 
• Expected date of availability for the buyer: July 2026

no missing parts

T/H controller 1 to 3 need service/repair

last time in production 10.1.2024

ACT8 DB System, 2 BCT, 2 COT, 3 DEV, 3 CHP, 1WEE, 10LHP, 2 ADH, 4 HHP, CWD,