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Chemical Vapor Deposition Equipment


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List all 11 product types under Chemical Vapor Deposition EquipmentList all 11 product types under Chemical Vapor Deposition Equipment
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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
   
257348

AMAT  

DXZ/CXZ Chamber 

List all items of this typeCluster PECVD Tools

in Production Tools

3 DXZ/CXZ Chambers for Centura/P5000:

3 DXZ/CXZ Chambers for Centura/P5000
Mainframe is transport rack

 
 1  
239336

AMAT  

Centura EPI 8 inch 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

AMAT Centura EPI 8 Zoll (#402):

The system was completely overhauled by us with external service AMAT on site at that time!; Blower controls upgraded every 3 chambers; Approximately 4 years ago the Complete Gas Cabinet was upgraded from Legaty to Universal Gas Cabinet on site with the FA. AMAT upgraded costs €0.5 million; The facility has proprietary Modorized Lift 3x;

 

 

 1  
256746

AMAT  

HDP Centura 

List all items of this typeCluster PECVD Tools

in Production Tools

AMAT Centura HDP:

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks

Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process

Process Chambers: A,B,C

Orienter chamber F

 1  
257523

AMAT  

AMAT EPI CENTURA 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

EPI 39 - AMAT EPI CENTURA :

Software Ver: B6.50

CB1 Amps: 300A

Vita Controller

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

 Standard pneumatic waferlift

Center Finding System: OTF

Buffer robot: HP+

Piezocon sensor: No

VSB: Yes

Wide Body LL

Tool called "EPI39"

 1   N*
257176

AMAT  

EPI Centura ACP 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

EPI Centura ACP 300mm "Yu Shan":

Brand new and unused EPI Centura ACP 300 mm

4 Chambers;  Chamber code RH3, Lamp type BNA8 R3
Mainframe Configuration E4 Single, 4 Facet SC ENP BLK2, Loadport AMAT Standard 300mm, EPI Water Module LT Design.

Tool out of Project: "Yu Shan"

The original rough IFX Equipment procurement value was 10,3 M€

Will be now sold for an attractive price.

 Equipment is... 

...brand new 

...never used  

...original packaged and crated 

...located in Asia 

...complete and fully functional 

...professional stored in Warehouse

 1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.