Cluster Plasma Tools

  1. AMAT Centura Hart

    Cluster Plasma Tools - Silicon

    AMAT Centura Hart

    Tool located in cleanroom, working for its purpose und complete. 

    Mainframe with 4 chambers. Equipment has Special VITA-Controller-Licence-Requirements.Sale only as single Parts (Chamber/Mainframe) due to limited space for deinstallationProcessANISOTROPProcedureCUBV

  2. AMAT Centura Hart

    Cluster Plasma Tools - Silicon

    AMAT Centura Hart

    Tool located in cleanroom, working for its purpose und complete. 

    Mainframe with 4 chambers. Sale only as single Parts (Chamber/Mainframe) due to limited space for deinstallationProcessANISOTROPProcedureCUBV