It’s a Clusterline 200 II CW with 3 PVD Chambers (Pos3/4/5) and 1 Degass Chamber (Pos1). PM5 is configured with a hot Chuck and a Pyrometer. The transport was upgraded in 2025 with a new Brooks control system, which includes a new aligner.

 This upgrade consists of:

• 1 piece of magnetically driven dual pan handling robot, BROOKS
• Magnatran MAG 7.1 with an extension capability of up to 860mm, equipped with BROOKS control system (non-Berkeley), including CDM
• 2 pieces of new load lock elevators
• Adapter flange for AWC (Active Wafer Centering)

   Additionally, a cooler on the transport is included.

  Available: end of September 2026