CLN 200 II
It’s a Clusterline 200 II CW with 3 PVD Chambers (Pos3/4/5) and 1 Degass Chamber (Pos1). PM5 is configured with a hot Chuck and a Pyrometer. The transport was upgraded in 2025 with a new Brooks control system, which includes a new aligner.
This upgrade consists of:
- 1 piece of magnetically driven dual pan handling robot, BROOKS
- Magnatran MAG 7.1 with an extension capability of up to 860mm, equipped with BROOKS control system (non-Berkeley), including CDM
- 2 pieces of new load lock elevators
- Adapter flange for AWC (Active Wafer Centering)
Additionally, a cooler on the transport is included.
Available: end of September 2026
1 unit @ Best Price
MAKE: OC Oerlikon Balzers
MODEL:
CATEGORY: Cluster Sputtering Tools
Villach, Austria
SPECS
| Manufacturer | OC Oerlikon Balzers |
| Wafer Size Range | |
| Minimum | 150 mm |
| Maximum | 200 mm |
| Set Size | 150 mm |
| Other Information | The following parts are excluded (Parts needed): Brooks Robot Mag 7.1 4pc_CTI Onboard IS Cryos 2pc. IS1000 Compressors RGAs Cooler Degasser Amplifier |
| Power Requirements | 380 V 250.0 A 50/60 Hz 1 Phase |
| CE Marked | YES |
| Year of Manufacture | 2007 |
| Condition | Good |
| Exterior Dimensions | |
| Width | 307.000 in (779.8 cm) |
| Depth | 263.300 in (668.8 cm) |
| Height | 196.100 in (498.1 cm) |
| Weight | 5,300 lb (2,404 kg) |
S&H
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
Payment
100% downpayment