AMAT Producer-VME200 8"
3 Chambers, the tool is working and is located in cleanroom
Procedure: FCG-TEOSLF Generator 3x
Cluster Plasma Tools
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AMAT - CENTURA-TECTRA-TXZ
CVD - TITIN
8''
Completeness: Partial
Function: need repair
Development_CVD_TiTIN
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