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Item ID  Short Description Product Type / Details # Price Notes Make Model     237203 ASM   Advance 400  Vertical Diffusion Furnaces in Diffusion Furnaces Advance 400: Both Tubes are in good condition. Last maintenance was in Dezember 2021. Tube 1D was last used January 2022 Tube 2D was last used August 2022 Tool is in original condition 1   237239 ASM   Advance 400  Vertical Diffusion Furnaces in Diffusion Furnaces Advance 400: Reactor 2 is still in Production Both Tubes are in good condition. Last maintenance was in Dezember 2022. Heating Cassette from 1D is broken. Tool is in original condition   1   242019 ATV Technologie GmbH   PEO 602  Horizontal LPCVD Furnaces in LPCVD Furnaces ATV PEO 602 tube furnace: This furnace can handle wafers up to 150mm Configuration: N2 -  1500 l/min N2 -    660 l/min Forming Gas 660l/min Temperature Control 0°C – up to 500°C max. Free Ramping (up to 99 steps max., one step up to 99,99 °C max.) Stainless Steel Calotte 0 – 5kg 1   242018 ATV Technologie GmbH   PEO 603  Horizontal LPCVD Furnaces in LPCVD Furnaces ATV PEO 603 tube furnace : This furnace can handle wafers up to 150mm Configuration: N2 -  1500 l/min N2 -    660 l/min Forming Gas 660l/min Temperature Control 0°C – up to 500°C max. Free Ramping (up to 99 steps max., one step up to 99,99 °C max.) Stainless Steel Calotte 0 – 5kg 1   240586 ASM   Advance 400  Vertical Diffusion Furnaces in Diffusion Furnaces Furnance: Furnance will be sold without Reactor 2 Parts for sale: WIP Reactor 1 Poly Cassetteheater Robot Housing Power Cabinet   1   231620 Bruce (BTI)   DSVA 24  Horizontal Diffusion Furnaces in Diffusion Furnaces Furnance BDF-41 Ofen 28B: Diffusion Furnance for atmospheric oxid processes. Tool is productive in use until 27.06.2022 1

*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

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