Cluster Plasma Tools - Poly/Nitride
AMAT P5000 XT (Poly - Trench) #267
Pictures are from parallel tool!
Applied Material P5000XT
-top mount elektronics and He backing
-2 Chamber Narrow Gap tool
-installed pos. Chamber A/B
-Standard Phase 3 Robot
-15 slot storage elevator
-ZA Slit Valves pos. A/B
-Wafer Positioning Sensor (WPS)
-Cassette loadport with 2 stages
-2 Monitor
-System SSD
-CF card Floppy emulator
-MXP Unibody chamber with Narrow Gap lid
-Turbo Seiki STP-301CVB
-Controller Seiki SCU-350D
-MKS Manometer
-7 Gas Sticks / Brooks GF 100 MFCs
-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4
-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)
-2x ENI OEM 12B RF generators
-AC Box at RF Rack