Automatic Wafer Inspection Tools

  1. KLA 2367 "Escape" Bright Field Inspection Tool

    Automatic Wafer Inspection Tools

    KLA 2367 "Escape" Bright Field Inspection Tool

    BrightField Inspektionstool 25 cassette HW 200mm GEM/SECS and HSMS Model Enable .12 , .62, .39 Picels

    ORS Upgrade done 

    Tool currently full installed at cleanroom (estimated time depending on areaneed)

     

    Sister tool available!

  2. Taiko Microscope (514-183)

    Automatic Wafer Inspection Tools

    Taiko Microscope (514-183)

    Microscope Olympus MX61A (Märzhäuser) with TDK 12" Loadport,(TAS300 Type: E4A) and SPA 8" Loadport, Isel Roboter, WID120 Barcodereader. Tool PC with WIN7