Contact Us  |  Terms  |  Imprint  |  Privacy     
 Fast  FIND      full search   tips    
  Specials  |  Listings:   Offered / Wanted / Both     |  Spare Parts Home     
Serving  Our Guest Log in    Register to speed trading
ALL CATEGORIES   Wafer Fabrication Eq   Ion Implantation Eq    View    Search-by-Specs   

FULL DESCRIPTION of Item 229835

in Medium Current Implanters
Item ID: 229835

Offered 1 Offered at Best Price


VARIAN E500 EHP

this Equipment is 

  • in very good condition. It was in Infineon usage until beginning of this year
  • good maintained
  • still installed in cleanroom and currently in preparation for de-installation
  • will be sold with Incoterm `FCA` de-contaminated, de-installed, packaged, crated and ready for pickup
  • planned to be ready for pick up until end of May 2022
  • located in Villach/Europe
  • offered with condition `as is`
  • planned to be awarded latest calendar week 17/2022 
  • ready for a quick sale in case of an outstanding offer

Technical data:

TypeE500 EHPI
Wafersize200mm
Machine S/NES193699
Manufacturing YearOct 2000
CE MarkYes
Connection top/bottomtop
 VARIAN E500 EHP
  Click to see additional image(s)... other images
Unit Price Unstated
Number of Units 1
Manufacturer Varian
Model E500 EHPI
Description Medium Current Implanter
Accessories 
Source    
Source #1 Bernas  
Vaporizer Option No  
     
Extraction System    
Extraction Electrode EHP  
Bushing EHP  
Extraction PS Yes E11005381 
Source Magnet Polarity Switch Yes E11057640 RevB
     
Gasbox    
 String #1 HP  
 String #2 HP  
 String #3 SDS  
 String #4 SDS  
     
Beamline     
Two Step Reducer Yes E11078910 RevC
Gauss Meter Yes E11053620 RevA
Terminal Pneumatics Yes E11064970 RevC
Auto Decel Yes  
Total Beamenergy Probe Yes  
Mirror PS Yes E11004140 RevC
Scan Amplifier Yes E19000790 RevA
Setup Cup Amplifier Yes E11000351 RevC
     
Endstation    
Chucksystem ESC  
Dose Integrator Yes E11001033 RevA
DI Temp Monitor Controller Yes E11001200 RevF
     
Platen Tilt Servo Controller Yes E11048890 RevB
Scanning Faraday Controller Yes E11048881 RevB
E-Flood Controller NO  
Right Elevator Controller Yes E11000821 RevA
Left Elevator Controller Yes E11000821 RevA
Orienter Controller Yes E11001411 RevA
Uniformormity Controller Yes E11001010 RevK
Gauge Controller Yes E11000071 RevB
Right Arm Controller Yes E11001000 RevH
Left Arm Controller Yes E11001000 RevH
     
Endstation Pneumatic Interface Yes E11064980 RevC
Right Handler Pneumatic Interface Yes E11064990 RevC
Left Handler Pneumatic Interface Yes E11064991 RevC
     
Control System    
Computer Win7,   E19008703
Remote Monitor No  
Software V15.11.12 SW-Licence must be purchased from AMAT
EHPI Computer No  
Light Tower Yes  
     
High Vac Pumps    
Source Turbo Pfeiffer TPH 1201 P  
Analyzer Turbo Pfeiffer TMH 261 Y P X  
Scanner Turbo Pfeiffer HiPace 700 P  
Endstation Cryo Torr10 8018236  
LoadLock right Cryo Torr4FR 8108996G001
LoadLock left Cryo Torr4FL 8108997G001
     
Dry Roughing Pumps    
Source/Terminal Edwards QDP80 not included
Differential Seal Varian Scroll  
Endstaton / Load Lock Edwards Setup not included
     
Remote Facility Rack    
Cryo Comp  9700A 8135924G001
Motor [INVALID]nator Yes  
DI Waterpump Yes  
Condition Very Good
Year of Manufacture 2000
Serial Number(s)ES193699

Payment:

100% downpayment