Source |
|
|
Source #1 |
Bernas |
|
Vaporizer Option |
No |
|
|
|
|
Extraction System |
|
|
Extraction Electrode |
EHP |
|
Bushing |
EHP |
|
Extraction PS |
Yes |
E11005381 |
Source Magnet Polarity Switch |
Yes |
E11057640 RevB |
|
|
|
Gasbox |
|
|
String #1 |
HP |
|
String #2 |
HP |
|
String #3 |
SDS |
|
String #4 |
SDS |
|
|
|
|
Beamline |
|
|
Two Step Reducer |
Yes |
E11078910 RevC |
Gauss Meter |
Yes |
E11053620 RevA |
Terminal Pneumatics |
Yes |
E11064970 RevC |
Auto Decel |
Yes |
|
Total Beamenergy Probe |
Yes |
|
Mirror PS |
Yes |
E11004140 RevC |
Scan Amplifier |
Yes |
E19000790 RevA |
Setup Cup Amplifier |
Yes |
E11000351 RevC |
|
|
|
Endstation |
|
|
Chucksystem |
ESC |
|
Dose Integrator |
Yes |
E11001033 RevA |
DI Temp Monitor Controller |
Yes |
E11001200 RevF |
|
|
|
Platen Tilt Servo Controller |
Yes |
E11048890 RevB |
Scanning Faraday Controller |
Yes |
E11048881 RevB |
E-Flood Controller |
NO |
|
Right Elevator Controller |
Yes |
E11000821 RevA |
Left Elevator Controller |
Yes |
E11000821 RevA |
Orienter Controller |
Yes |
E11001411 RevA |
Uniformormity Controller |
Yes |
E11001010 RevK |
Gauge Controller |
Yes |
E11000071 RevB |
Right Arm Controller |
Yes |
E11001000 RevH |
Left Arm Controller |
Yes |
E11001000 RevH |
|
|
|
Endstation Pneumatic Interface |
Yes |
E11064980 RevC |
Right Handler Pneumatic Interface |
Yes |
E11064990 RevC |
Left Handler Pneumatic Interface |
Yes |
E11064991 RevC |
|
|
|
Control System |
|
|
Computer |
Win7, |
E19008703 |
Remote Monitor |
No |
|
Software |
V15.11.12 |
SW-Licence must be purchased from AMAT |
EHPI Computer |
No |
|
Light Tower |
Yes |
|
|
|
|
High Vac Pumps |
|
|
Source Turbo |
Pfeiffer TPH 1201 P |
|
Analyzer Turbo |
Pfeiffer TMH 261 Y P X |
|
Scanner Turbo |
Pfeiffer HiPace 700 P |
|
Endstation Cryo |
Torr10 8018236 |
|
LoadLock right |
Cryo |
Torr4FR 8108996G001 |
LoadLock left |
Cryo |
Torr4FL 8108997G001 |
|
|
|
Dry Roughing Pumps |
|
|
Source/Terminal |
Edwards QDP80 |
not included |
Differential Seal |
Varian Scroll |
|
Endstaton / Load Lock |
Edwards Setup |
not included |
|
|
|
Remote Facility Rack |
|
|
Cryo Comp |
9700A |
8135924G001 |
Motor [INVALID]nator |
Yes |
|
DI Waterpump |
Yes |
|