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Wafer Fabrication Equipment


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List all 98 product types under Wafer Fabrication EquipmentList all 98 product types under Wafer Fabrication Equipment

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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
   
230954

Genmark Automation  

GB4P 

List all items of this typeWafer Transfer Units

in Robotics

1x Waferhandlingsrobot Genmark GB4P telescopic for 200mm:

complete, fully functional, inclusive integrated prealigner and notching, platform axis Z, cableset

and controller

used, working, frequently maintenance at Genmark office done

Manual existing

Decontamination Report existing

refurbished

1   N*
230955

Genmark Automation  

GB4P 

List all items of this typeWafer Transfer Units

in Robotics

3x Waferhandlingsrobot Genmark GB4P telescopic for 200mm:

complete, fully functional, inclusive integrated prealigner and notching, platform axis Z, cableset

and controller

used, working, frequently maintenance at Genmark office done

Manual existing

Decontamination Report existing

used

1   N*
227363

NADAtech  

n47 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

6"/8" Wafer Sorter / Barcode Reader:

Nadatech n Series Wafer Sorter 

6" and 8"

4 cassette stations

with greenlight gyro station (front- and backside inspection)

Moog robot (fast wafer centering on movement to aligner)

2x IOSS Wafer ID Reader (Barcode or Text)

Manuals available

1   F*
231368

Nikon  

FPA-3000 i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon Stepper FPA-3000 i4:

Customer ID: CAI401

Customer inventory: 227214

S/N Machine: 504 456

Type: FPA-3000 i4

 

Reticle: Size 6" square t=? (Nikon Style or Canon Style reticle loader?): 6” Reticle / t= 0,25” / Nikon Type Reticle Changer

Stage Type: ABS
Chamber Type: TBW-CD-80 (Compact Chamber Model)

 

1   N*
229481

Ebara  

FREX300S 

List all items of this typeCMP Polishers

in Chemical Mechanical Planarization Equipment

CMP Ebara FREX300S:

Still installed - ready for inspection.

Available for de-installation ~ August

Tool called "Wolfram Ebara"

12" CMP tool, 2 polish tracks à 2 platen, 3x roll roll cleaner, 4x G3 AI head, eddy current endpoint on pol A + C, spin rinse dryer

 

 

1  
226711

DEVICEENG  

DE Korean Benches 

List all items of this typeAcid Wet Stations

in Wafer Cleaners

DEVICEENG - WET Clean Strip Benches :

Our technical wet clean ID: WETANCL10

We have 3 further tools of this kind and could sell all four as a package even if the release dates are different.

All four tools are located in Kulim/Malaysia.

We would appreciate a quick sale and de-installation.

 

1  
225014
Evatec BAP 801 

List all items of this typeElectron Beam Evaporators

in Evaporation Tools

Evatec BAP 801:

BAP7

Evaporation tool with 2 E-Guns

 

1  
225314
Evatec BAP 801 

List all items of this typeElectron Beam Evaporators

in Evaporation Tools

Evatec BAP 801:

BAP8

Evaporation tool with 2 E-Guns

1  
226539

EVG  

Gemini Automated Production Wafer Bonding System 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

EVG Bonder:
  • EFB01
      • 1) full automated production wafer bond system GEMINI with two Kawasaki robots up to 200m wafer with mini environment class 1;
      • 2) SmartView NT2 Align module with customized additional center to center alignment and different chucks (edge grip, 6 inch), alignment typically < 1µm
      • 3) Bond module for max 200mm wafer up to 550°C and 10kN, flag pulling mechanism; piston force up to 20kN, overprs 3bar absolute, vacuum < 1x10e-5mbar
      • 4) cleaning module: jet nozzle, megasonic, 2 chemistry lines, N2 nozzle,dry spin
      • 5) lowTemp Plasma activation module; 100-200mm wafer,3 Gaslines, high frequency / low frequency RF Generator to 200W, Turbo molecular Pump for vac system
      • 6) IR Inspection station with sorting option
      • 7) Chiller

The Equipment is nearly new - meaning unused. It was only used for tests.

1  
210404

Suss MicroTec  

Falcon Polyimid Developer 

List all items of this typeStandard Photoresist DevTracks

in Photoresist Develop Track Systems

Fairchild Developer Ent3C:

Developer with 2 chambers for spray developing.

 

1  
227087

Axcelis Technologies  

Optima HD 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

IMPLANTER Axcelis Optima HD:

 

The tool has to leave the cleanroom very soon.

Therefore we would appreciate a fast sale, if possible next week.

A de-installation service from a third party is possible.

 

1   F*
230848

Meyer Burger (Nether  

JETx-S Inkjet Printer PiXDRO cluster 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

Ink Jet Printer:

FOTP16-01

Last time in production 08/22

 

1   N*
226452

LAM Research Corp.  

RST304 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

LAM SEZ RST304:

SP304 - SN0947

300mm / 12" Equipment

Chuck STD

Brooks ATM407 w Flip-Module

Medium1
used for HF HouseSupply,
able to mix DHF
Mix-Tank,
Buffer-Tank (10ml BP) for HF,
PW for DI
Single-Hex

Medium2
used for DSP from CBM
able to mix DHF
NO Mixtank !
Buffer.Tank (10ml) HF (not used)
PW for DI
Double-Hex

Medium3
used for SED HouseSupply
NO Mixtank
Buffer-Tank(10ml) HF
Double-Hex

CBM
3 BufferTanks (H2SO4/H2O2/HF)
1 PW (DI)

Ozon-DIW
Modul is not functional, components removed/defective
- O3-generator removed
- O3-contactor defective
- ctrl-cabinet some parts(solenoid block)

Tool is located in Dresden, Germany.

Planned de-installation date is 1st September 2022. 

1  
224568
Mechatronic 300mm Sorter 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

Mechatronic 300mm Sorter:

Sort-05

Mechatronic Sorter for 200 and 300mm

With bernoulli Aligner for 8 and 12 inch and IOSS Camera.

And greenlight inspection.

With 4 Synfoniy 300mm Loadports, 2 on the front side and 2 on the backside.

1  
224956
Mechatronic 300mm Sorter 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

Mechatronic 300mm Sorter:

Sort-07

Mechatronic Sorter for 200 and 300mm

With bernoulli Aligner for 8 and 12 inch and IOSS Camera.

With 4 Synfoniy 300mm Loadports, 2 on the front side and 2 on the backside.

1  
209425

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

P5000 Depositiontool P500049:

P500049

4 Chambers
2 Chambers Etch, 2 Chambers CVD
Teos

1  
219066

Shibaura  

CDE300 

List all items of this typeCluster Plasma Tools - Metal

in Cluster Plasma Tools

Shibaura CDE300 :

CDE301

Plasma Etch Tool for SI Grieß, SNIT, Imid, Titan, Tungsten

1  
218898

Unaxis  

CLC200 

List all items of this typeCluster Sputtering Tools

in Single Wafer Sputtering Tools

Sputtertool Clusterline Unaxis:

CL-MET-04

Sputtertool with 6 chambers

1   F*
229835

Varian  

E500 EHPI 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

VARIAN E500 EHP:

this Equipment is 

  • in very good condition. It was in Infineon usage until beginning of this year
  • good maintained
  • still installed in cleanroom and currently in preparation for de-installation
  • will be sold with Incoterm `FCA` de-contaminated, de-installed, packaged, crated and ready for pickup
  • planned to be ready for pick up until end of May 2022
  • located in Villach/Europe
  • offered with condition `as is`
  • planned to be awarded latest calendar week 17/2022 
  • ready for a quick sale in case of an outstanding offer

Technical data:

TypeE500 EHPI
Wafersize200mm
Machine S/NES193699
Manufacturing YearOct 2000
CE MarkYes
Connection top/bottomtop
1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.