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Wafer Fabrication Equipment


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Group Offers into sub-categories under Wafer Fabrication EquipmentGroup Offers into sub-categories under Wafer Fabrication Equipment

List all 98 product types under Wafer Fabrication EquipmentList all 98 product types under Wafer Fabrication Equipment

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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
   
252024

Applied Materials  

200mm Centura II 

List all items of this typeCluster Plasma Tools - Other

in Cluster Plasma Tools

AMAT 200mm Centura II DXZx:

Centura MF II

Software: Vita Controller

Indexer: Narrow Body / Tilt out mit Dummy Wafer Storage

Robot: HP+

Chamber:

A -> DPS+

B -> DPS+

C -> IPS

D -> ASP+

E -> Single Cooldown

F -> Orienter

1  
230352

Applied Materials  

P16-072 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Ancolyzer P16-072:

3 x Dosage Additive

2 x Slipstreams with pump

2 x Dosing VMS incl. Bleed & Feed

Bulk Fill Tanks

additional doses of H2O2 und H2SO4

Scanner incl. software

 

 

 

1  
252684
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

-MCINV8201

-currently tool is still warm down

1  
252685
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

MCINV8202

Tool is currently under Warm down.

1  
250598

Axcelis Technologies  

OPTIMA_HD 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

1  
242851

Kufner  

Batch Etching Basin (KOH) 

List all items of this typeAcid Wet Stations

in Wafer Cleaners

Batch Etching Basin (KOH):

Complete dip acid etching unit manufactured by Kufner, Germany. The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing si-wafers after grinding (KOH). Delivery of additional accessories is possible.

 

If there is a seriously buying interest, the technical specifications could be send

1  
249646

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
no transportation locks available;

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT (see pictures)

no UPS installed. No printer installed. No MO-drive.

EOL: optical parts

1  
249647

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
no transportation locks available;

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT (see pictures)

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 

 

1  
250700

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1  
250701

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1  
242940

Kufner  

Batch Etching Basins 

List all items of this typeAcid Wet Stations

in Wafer Cleaners

Dip-etch wet benchs:

4x Dip-etch wet bench (1998)

 

Complete dip acid etching unit manufactured by Kufner, Germany. The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing bonded si-wafers up to 80mm diameter.

Delivery of additional accessories is possible.

 

If there is a seriously buying interest, the technical specifications could be send.

1  
251212

Eaton  

GSD200E/80 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

Eaton GSD200E/80 Highcurrent:
Energy Config:0 - 80Kv Highcurrent
Serialnumber:80517
Build Year:2000
Date of first usage:begin of year 2001
Current Condition: Good
CE-Conformity:Yes
Cryo-Pumps:CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!!
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko STP A2203 fully refurbed included!!
Terminal-Rough-Pump:without (Edwards Config)
Endstation Rough-Pump:without (Edwards Config)
Wafersize:200mm
Disk-Type:Si-coated Disk fully refurbed included!!
Wafer-Cooling:no Disk-Chiller included !
Gasbox:5-String, 4x Toxic-Low-Pressure
String1:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String3:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String4:SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String5:Argon Carriergas; MFC Brooks GF120 10sccm-N2
Disk-Drive:Direct-Drive
Dose-Type:Regular
Source-Type:ELS4 IHC-Source without Vaporizer
Hghvoltage-Transformer:dry
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSUN Solaris AXI 3HE
Second-Workstationwithout
Software-Version:6.13.5.1 (no license included)
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:V6 Type
Conditiontool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024
AvailabilityImmediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers
Notes:slight corrosion spots on the frame, just a visual matter, see IMG_0810_n.jpg
 Clean-Room Table on frontside not included
 Original Lower Machine Front Panels not included (below the Table)
 Rough-Pumps not included
 Endstation Flowhood not included
 Disk-Chiller not included
 modified Plasma-Gun Power-Supply installed(TDK)
 Minor modifications on tool
 No Manual-Set/ no Spares
 If required, tool can be inspected on site
1  
238643

PVA TePla  

TWIN 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

1  
251862

LAM Research Corp.  

SEZ203 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

LAM SEZ203:

Completeness partial

- Z80 missing

- CDS not running

- Tool is EOL

1  
251863

LAM Research Corp.  

SEZ203 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

LAM SEZ203:

Completeness partial

- Z80 missing

- Tool is EOL

1  
251921

Mattson Technology  

SHS 2800 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Mattson SHS 2800 RTP:

Description:

- Tool controller with Win7 (Updated 2019)

- Remonte controller backside with monitor and keyboard

- Temperatur measurement with Ripple Pyrometrie

- High cooling with Jet Venturi System

- Process: Oxid (BPSG + RTP Tempern)

1  
251922

Mattson Technology  

SHS 2800 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Mattson SHS 2800 RTP:

Description:

- Tool controller with Win7 (Updated 2018)

- Remonte controller backside with monitor and keyboard

- Temperatur measurement with Ripple Pyrometrie

- High cooling with Jet Venturi System

- Process: Oxid (BPSG + RTP Tempern)

1  
223074

Novellus Systems  

Concept Two SPEED 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Novellus Concept Two SPEED (shrink):

1 Mainframe w/ 3 Chambers 

Damages/Deficites: Chamber Turbo Pumps & HF/LF Generators 
EOL: Turbo Pumps

 

no significant failures between last 3 years

1  
242852

KVA GmbH  

automatisierte Si-Pellets Ätzbank 

List all items of this typeAcid Wet Stations

in Wafer Cleaners

Pellet Edge Batch Etch Tool:

Automtic dip-etch bench (2014)

 

Complete dip acid etching unit manufactured by KVA, Austria. The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing semiconductor devices (Diode, Thyristor)

up to 58 mm, delivery of additional accessories is possible.

 

If there is a seriously buying interest, the technical specifications could be send

1  
239644

Ramgraber  

SST 

List all items of this typeSolvent Wet Stations

in Wafer Cleaners

Ramgraber SST:

Used Configuration:

Tank 1: EKC

Tank 2: P1331

Tank 3 and 4: DMF

Tank 5: IPA

Known errors:

Filter from tank 4 is leaking

Heater 1 from tank 4 is broken

Heater 3 from tank 4 is broken

1   F*
240589

Semitool  

see attached type lable 

List all items of this typeSpin Rinse Dryers

in Wafer Cleaners

Semitool Spin Rinser Dryer (2010):

Single Spin Rinser Dryer as tabletop unit (s. attached picture). The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing up to 6" wafers, delivery of additional accessories possible (p.e. wafercarriers and adapters)

1  
246568

Ramgraber  

see attached type lable 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Single-Wafer Spin Etch machine (2008):

Complete single-wafer spin etching unit manufactured by Ramgraber Company (Germany). The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing up to 6" wafers, delivery of additional accessories is possible.

1  
249206

Kufner  

3522 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Single-Wafer Spin Etch machine (2008):

Complete single-wafer spin etching unit manufactured by Kufner Company (Germany). The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing up to 6" wafers, delivery of additional accessories is possible.

 

If there is a seriously buying interest, the technical specifications could be send.

1  
249207

Kufner  

3681 Nr. RAS6 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Single-Wafer Spin Etch machine (2009):

Complete single-wafer spin etching unit manufactured by Kufner Company (Germany). The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing up to 6" wafers, delivery of additional accessories is possible.

 

If there is a seriously buying interest, the technical specifications could be send.

1  
249208

Kufner  

RÄS7 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Single-Wafer Spin Etch machine (2010):

Complete single-wafer spin etching unit manufactured by Kufner Company (Germany). The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing up to 6" wafers, delivery of additional accessories is possible.

 

If there is a seriously buying interest, the technical specifications could be send.

1  
252586

LAM Research Corp.  

SEZ SP 203 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Spin Etch Tool (8''tool):

Spin Etch Tool (8''tool)

1  
241408

Ramgraber  

Inline-Sprühätzanlage 

List all items of this typeAcid Wet Stations

in Wafer Cleaners

Spray acid etching system (2008):

Complete spray acid etching unit manufactured by Ramgraber Company (Germany). The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing up to 6" wafers, delivery of additional accessories is possible.

 

If there is a seriously buying interest, the technical specifications could be send.

1 € 30,000.00
250488

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A1
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 Last Time in production 1/1/24

 

1  
250489

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

Last Time in production 1/1/24

 

1  
250490

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

1  
250491

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#2
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Shinwa CP-I
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 

Last time in production: 01.01.24

1  
237878

Accretech  

UF3000EX-e 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

TSK-Prober 209:

Probertyp

UF3000EX-e

Hinge Manipulator

No

Type of tester head plate

Agilent

Prober power supply rate

230V

Chuck Type (Nickel, Gold, etc.)

Gold, Plane, Bernoulli

  

Network/connection

Yes

APCC Auto Probe Card Changer

No

Top Side Handling

Yes, V1 mit Bernoulli

Cleaning pad module

Yes

The Prober is sold without the hinge!! (marked red in the picture)

1  
250971

AP&S Customized Soln  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean Strip (8''tool):

WET Clean Strip (8''tool)

1  
250972

AP&S Customized Soln  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean Strip (8''tool):

WET Clean Strip (8''tool), Currently the tool still working.

1  
253558

Tel  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean with Ultrasonic Cleaner 8'':

WET Clean with Ultrasonic Cleaner 8''

1   N*
243576

ISM Industrie Servic  

n.a. 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Workbench for the removing of photo resists:

Stainless steel workbench with ultrasonic bath for the removing of photoresisted silicon-wafers. The bench was built as custom-made product. The system is still in use, therefore there is the possibility for a sale on inspection.

Capable of processing up to 6" wafers, delivery of additional accessories is possible.

 

If there is a seriously buying interest, the technical specifications could be send.

1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.