Contact Us  |  Terms  |  Imprint  |  Privacy     
 Fast  FIND      full search   tips    
  Specials  |  Listings:   Offered / Wanted / Both     |  Spare Parts Home     
Serving  Our Guest Log in    Register to speed trading
ALL CATEGORIES   View   Search-by-Specs   
View All Offers Under

Wafer Fabrication Equipment


» Switch Major Category
Click an item's ID# below for its full specifications , or:

Group Offers into sub-categories under Wafer Fabrication EquipmentGroup Offers into sub-categories under Wafer Fabrication Equipment

List all 98 product types under Wafer Fabrication EquipmentList all 98 product types under Wafer Fabrication Equipment

 Download Equipment List (.xls)  See all our available offerings! 

  • To sort on a column, click the column head; click it again to reverse the sort.
  • Click the links under the Product Type column head to see other like items of that type.
 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
   
257348

AMAT  

DXZ/CXZ Chamber 

List all items of this typeCluster PECVD Tools

in Production Tools

3 DXZ/CXZ Chambers for Centura/P5000:

3 DXZ/CXZ Chambers for Centura/P5000
Mainframe is transport rack

 
1  
256502

LAM Research Corp.  

Allian 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

1  
252024

Applied Materials  

200mm Centura II 

List all items of this typeCluster Plasma Tools - Other

in Cluster Plasma Tools

AMAT 200mm Centura II DXZx:

Centura MF II

Software: Vita Controller

Indexer: Narrow Body / Tilt out mit Dummy Wafer Storage

Robot: HP+

Chamber:

A -> DPS+

B -> DPS+

C -> IPS

D -> ASP+

E -> Single Cooldown

F -> Orienter

1  
239336

AMAT  

Centura EPI 8 inch 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

AMAT Centura EPI 8 Zoll (#402):

The system was completely overhauled by us with external service AMAT on site at that time!; Blower controls upgraded every 3 chambers; Approximately 4 years ago the Complete Gas Cabinet was upgraded from Legaty to Universal Gas Cabinet on site with the FA. AMAT upgraded costs €0.5 million; The facility has proprietary Modorized Lift 3x;

 

 

1  
256746

AMAT  

HDP Centura 

List all items of this typeCluster PECVD Tools

in Production Tools

AMAT Centura HDP:

Software: Win 10

OR 4000 WTM Controller

3x ENI Generator Racks

Chiller INR-498-011D

2x Remote Monitor

High Density Plasma Process

Process Chambers: A,B,C

Orienter chamber F

1  
256339

Varian  

 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Amat E500:

-Back end medium current Implanter

 

- 100002956

  
1  
259241

AMAT  

Back end Implanter Amat E500 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

AMAT E500:
› Original Equipment Manufacturer? (Yes/No, if no please state the details ) Yes
› Exact Model Type? (Yes/No, if no please state the details ) E500 EHP
› OEM Serial ID?ES193741 U2
› Completeness: Total/partial/Donor tool? Please list missing parts.Total
› Date of first usage?NA
› Technic special customized for Infineon?NA
› Correct maintained?Yes
› Any damages/deficits known?No
› Manuals existing?No
› Crated: If yes…/ professional with protocol / partly / simple?No
› Detailed Configuration/Specification of the tool 
› Any upgrades / extensions?Thin Wafer handling kit, Hydrogen implant, LX upgrade, Windown 7 OS
› Useable for which products?8"  Thin Taiko wafers
› Wafer size (if applicable)?200mm
› Any consumables at end of lifetime?Yes (source, electrode)
› Procured from OEM or from second hand?From IR Singapore
› Any refurbishments done?No
› Any doubts that the tool is failure free useable for the next three years?Yes
› Was there a significant system failure in the last three years?No
› Any contaminations known?BF3, H2
› IFX inventory200016809
> LocationINFINEON KULIM FAB 2 LEVEL 3 PRODUCTION AREA CLEANROOM
 
1   N*
255502

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Advance - OFENV06C:

ASM Furnace Vertical - Advance 400

2 Reactors atmospheric

 

1  
255500

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV01D:

OFENV01D
Furnace with 2 Tubes

1x Reactor Dot. Poly Low Pressure

1x Reactor Atmosphere WET-OXID

1  
255501

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV05C:

ASM Furnace Vertical - Advance 400

2 Reactor atmospheric

Robot defect and need service 

1  
255503

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV06D:

ASM Furnace Vertical - Advance 400

2x Reactor Dot. Poly Low Pressure

1  
255504

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV07C:

ASM Furnace Vertical 

2 Reactor atmospheric

Reactor 1 is missing heater cassette, Motor driver, Board and loader arm

 

1  
252684
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

-MCINV8201

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› OEM Serial ID?

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Manufacturing date of the Equipment ?

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100000605

1  
252685
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

MCINV8202

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100001850

1  
256469

Axcelis/Eaton  

NV8250HT 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

Axcelis NV8250HT #941:
Equipment Konfiguration: 
Type:NV8250HT
Energy Config:0 - 250Kv Midcurrent
Serialnumber:908
Build Year:2002
Date of first usage:buyed new from vendor
Current Condition: Good
CE-Conformity:Yes
Location:greyroom
Voltage:208V
Cryo-Pumps:3x CTI/Edwards Onboard: OB-8
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko/Edwards: STP1003C, STP-301C, STP-1003C
Rough-Pumps:Edwards: without QDP40, not included
Endstation Rough-Pump:not included
Wafersize:8inch(200mm)
Clamp-Type:E-Chuck green with Non-µC Controller
Wafer-Cooling:Galden HT110 with Affinity PWC-020K-BE35CBD2 (R507) (condition unclear)
Gasbox:Modular 5-String, 4x 2,0L Size
String1:Argon Carriergas; MFC Unit-1662 2sccm BF3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC Unit-1662 2sccm BF3
String3:condition unclear, Type VCR 1/4" MFC Unit-1662 2sccm BF3
String4:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
String5:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC Unit-1662 2sccm BF3
Beam-Profiler Type:Belt-Drive
Gear-Type's:Scan: Planetary  Tilt: Planetary
Source-Type:ELS4 IHC-Source without Vaporizer
HV-Transformer:Silicon-Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSolaris SUN AXI 3HE (Special case)
Second-WorkstationSolaris SUN Sparc5
Software-Version:5.1.4.1
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:177 Type
Notes:Upper-Rack Panel missing
 Clean-Room Table missing on frontside
 all 4 wheels on oil-isolation transformer are broken
 Minor modifications on tool
 No Manual-Set/ no Spares include
 tool was used 24/7 full in production between 15 and 230kv Energy
 If required, tool can be inspected on site, but no Power
1  
250598

Axcelis Technologies  

OPTIMA_HD 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

1  
250700

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Only for sale for an competetive price!

 

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1  
250701

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1  
257523

AMAT  

AMAT EPI CENTURA 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

EPI 39 - AMAT EPI CENTURA :

Software Ver: B6.50

CB1 Amps: 300A

Vita Controller

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

 Standard pneumatic waferlift

Center Finding System: OTF

Buffer robot: HP+

Piezocon sensor: No

VSB: Yes

Wide Body LL

Tool called "EPI39"

1  
257176

AMAT  

EPI Centura ACP 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

EPI Centura ACP 300mm "Yu Shan":

Brand new and unused EPI Centura ACP 300 mm

4 Chambers;  Chamber code RH3, Lamp type BNA8 R3
Mainframe Configuration E4 Single, 4 Facet SC ENP BLK2, Loadport AMAT Standard 300mm, EPI Water Module LT Design.

Tool out of Project: "Yu Shan"

The original rough IFX Equipment procurement value was 10,3 M€

Will be now sold for an attractive price.

 Equipment is... 

...brand new 

...never used  

...original packaged and crated 

...located in Asia 

...complete and fully functional 

...professional stored in Warehouse

1  
238643

PVA TePla  

TWIN 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

1  
256920

Varian  

Viision 200+ 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

Implanter Varian Viision 200+:

200 mm Implanter in very good condition

Price net 982k$  based on Incoterm FCA, as is without warranty

 

1 $ 982,000.00
255371

Suss MicroTec  

ACS200 Gen3 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

InkJet Printer (Süss ACS200):

Süss Micro Tec ACS200 Gen 3

1  
256750

LAM Research Corp.  

Alliance 9400 PTX 

List all items of this typeCluster Plasma Tools - Poly/Nitride

in Cluster Plasma Tools

LAM Alliance 9400 PTX:

Mainframe with 3 Plasmachambers

C-Upgrade in 2024

Mainframe and 2 Plasmachambers fully usable

1 Plasmachamber Hardware incomplete

1  
255827

LAM Research Corp.  

2300 Kiyo 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

Lam Kiyo Chamber L2301-B:

Semiconductor ETC Chamber with RF Cart

Incl. Gasbox and Rocker Valve

in production until January 2023
1  
259300

LAM Research Corp.  

Rainbow 4520 XL 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

LAM Rainbow 4520 XL:

- without UI Computer, Chiller and Pump

- Generatorrack with 2 Generatoren 2MHz und 27MHz (135kg)

- no ISO Chamber

1   N*
259305

LAM Research Corp.  

TCP 9600 

List all items of this typeCluster Plasma Tools - Metal

in Cluster Plasma Tools

LAM Research TCP 9600:

- without UI Computer

- Envision, ESC, Fixed Gap

1   N*
256294
Nexx Apollo PVD 

List all items of this typeHorizontal Sputterers

in Batch Sputtering Tools

Nexx Apollo PVD:

The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafers. It uses a staged vacuum system that allow short pump down time to achieve ultra high vacuum. The multi chamber design allows for precise control over all process parameters.

1  
239644

Ramgraber  

SST 

List all items of this typeSolvent Wet Stations

in Wafer Cleaners

Ramgraber SST:

Used Configuration:

Tank 1: EKC

Tank 2: P1331

Tank 3 and 4: DMF

Tank 5: IPA

Known errors:

Filter from tank 4 is leaking

Heater 1 from tank 4 is broken

Heater 3 from tank 4 is broken

1   F*
256749

Semitool  

Cintillio SAT 

List all items of this typeAcid Wet Stations

in Wafer Cleaners

Semitool Cintillio SAT (WET998-03):

Toolcontroller with Windows XP

Remote controller

Ready for endpointdetection system

Process: Copper / Titan-Wolfram / dHF (dilluted HF)

div. spareparts possible (negotiable)

1  
252586

LAM Research Corp.  

SEZ SP 203 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Spin Etch Tool (8''tool):

Spin Etch Tool (8''tool)

1  
258113

Tel  

ACT8-D 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL ACT8-D -Track :

ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3

1   N*
250488

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A1
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 Last Time in production 1/1/24

 

1  
250489

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

Last Time in production 1/1/24

 

1  
250490

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

1  
250491

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#2
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Shinwa CP-I
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 

Last time in production: 01.01.24

1  
250971

AP&S Customized Soln  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean Strip (8''tool):

WET Clean Strip (8''tool)

1  
250972

AP&S Customized Soln  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean Strip (8''tool):

WET Clean Strip (8''tool), Currently the tool still working.

1  
253558

Tel  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean with Ultrasonic Cleaner 8'':

WET Clean with Ultrasonic Cleaner 8''

1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.