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Wafer Fabrication Equipment


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Group Offers into sub-categories under Wafer Fabrication EquipmentGroup Offers into sub-categories under Wafer Fabrication Equipment

List all 98 product types under Wafer Fabrication EquipmentList all 98 product types under Wafer Fabrication Equipment

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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
   
252024

Applied Materials  

200mm Centura II 

List all items of this typeCluster Plasma Tools - Other

in Cluster Plasma Tools

AMAT 200mm Centura II DXZx:

Centura MF II

Software: Vita Controller

Indexer: Narrow Body / Tilt out mit Dummy Wafer Storage

Robot: HP+

Chamber:

A -> DPS+

B -> DPS+

C -> IPS

D -> ASP+

E -> Single Cooldown

F -> Orienter

1  
239336

AMAT  

Centura EPI 8 inch 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

AMAT Centura EPI 8 Zoll:

The system was completely overhauled by us with external service AMAT on site at that time!; Blower controls upgraded every 3 chambers; Approximately 4 years ago the Complete Gas Cabinet was upgraded from Legaty to Universal Gas Cabinet on site with the FA. AMAT upgraded costs €0.5 million; The facility has proprietary Modorized Lift 3x;

 

 

1  
230352

Applied Materials  

P16-072 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Ancolyzer P16-072:

3 x Dosage Additive

2 x Slipstreams with pump

2 x Dosing VMS incl. Bleed & Feed

Bulk Fill Tanks

additional doses of H2O2 und H2SO4

Scanner incl. software

 

 

 

1  
255502

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Advance - OFENV06C:

ASM Furnace Vertical - Advance 400

2 Reactors atmospheric

 

1   N*
255500

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV01D:

OFENV01D
Furnace with 2 Tubes

1x Reactor Dot. Poly Low Pressure

1x Reactor Atmosphere WET-OXID

1   N*
255501

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical - OFENV05C:

ASM Furnace Vertical - Advance 400

2 Reactor atmospheric

Robot defect and need service 

1   N*
255503

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV06D:

ASM Furnace Vertical - Advance 400

2x Reactor Dot. Poly Low Pressure

1   N*
255504

ASM  

Advance 400 

List all items of this typeVertical Diffusion Furnaces

in Diffusion Furnaces

ASM Furnace Vertical OFENV07C:

ASM Furnace Vertical 

2 Reactor atmospheric

Reactor 1 is missing heater cassette, Motor driver, Board and loader arm

 

1   N*
252684
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

-MCINV8201

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› OEM Serial ID?

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Manufacturing date of the Equipment ?

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100000605

1  
252685
AXCELIS NV8200P 

List all items of this typeMedium Current Implanters

in Ion Implantation Equipment

AXCELIS NV8200P:

MCINV8202

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› A pictures say more as 1.000 words. Any pictures available? Please provide as much as possible.

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100001850

1  
250598

Axcelis Technologies  

OPTIMA_HD 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

1  
254917

Canon  

5500iZ 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

CANON 5500iZ:

still in production, deinstallation date 01.02.25

1) no harddisk in stepper Workstation (EWS) installed:
backup of stepper system parameter available
2) No Hg-lamp installed
3) No UPS unit installed.
4) all batteries, C-oil and cooling fluid will be removed before shipping because of safety regulations
5) no MO drive installed

- wafer handling and wafer chuck configured for 12" wafer processing
- SMIF pod reticle changer
- 6" reticle size

1   N*
250700

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1  
250701

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
Nikon Type Reticle changer; 6" Reticle

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT

Hg lamp will be removed prior shipping
Coolant will be removed prior shipping
Batteries will be removed prior shipping

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 Last Time in production: 05/24

 

1  
249646

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
no transportation locks available;

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT (see pictures)

no UPS installed. No printer installed. No MO-drive.

EOL: optical parts

1  
249647

Canon  

3000i4 

List all items of this typeI-Line Wafer Stepper

in Wafer Steppers

Canon FPA 3000 i4 Stepper :

Configuration: left inline system;
8" wafer chuck;
no transportation locks available;

major hardware and software changes in control system: EWS type changed to HP B180, O/S changed to HP-UX 10.20, original X-Terminal replaced by a Windows PC + 17" touchscreen TFT (see pictures)

no UPS installed. No printer installed. No MO-drive

EOL: optical parts

 

 

1  
251212

Eaton  

GSD200E/80 

List all items of this typeHigh Current Implanters

in Ion Implantation Equipment

Eaton GSD200E/80 Highcurrent:
Energy Config:0 - 80Kv Highcurrent
Serialnumber:80517
Build Year:2000
Date of first usage:begin of year 2001
Current Condition: Good
CE-Conformity:Yes
Cryo-Pumps:CTI/Edwards Onboard; OB-8 + OB-10 fully refurbed included!!
Cryo-Kompressor:CTI 9650 Low-Voltage
Turbo-Pumps:Seiko STP A2203 fully refurbed included!!
Terminal-Rough-Pump:without (Edwards Config)
Endstation Rough-Pump:without (Edwards Config)
Wafersize:200mm
Disk-Type:Si-coated Disk fully refurbed included!!
Wafer-Cooling:no Disk-Chiller included !
Gasbox:5-String, 4x Toxic-Low-Pressure
String1:PH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String2:BF3 SDS-Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String3:AsH3 SDS-Low-Pressure Type VCR 1/2"; MFC MKS-1640A; 5sccm-AsH3
String4:SIF4 Low-Pressure Type VCR 1/4"; MFC MKS-1640A; 5sccm-AsH3
String5:Argon Carriergas; MFC Brooks GF120 10sccm-N2
Disk-Drive:Direct-Drive
Dose-Type:Regular
Source-Type:ELS4 IHC-Source without Vaporizer
Hghvoltage-Transformer:Oil
Light-Tower:red/yellow/green; no buzzer
Main-WorkstationSUN Solaris AXI 3HE
Second-Workstationwithout
Software-Version:6.13.5.1 (no license included)
Network:24port 100MB Ethernet with Cisco Router-Kit
Cell-Controller:V6 Type
Conditiontool run fully productive (24/7) between 15 and 80kv Energy until we switched it off on 07/2024
AvailabilityImmediately. Start of shipment at the earliest 8 weeks after receipt of payment due to decontamination, dismantling and packing of the tool. Depending on the availability of external service providers
Notes:slight corrosion spots on the frame, just a visual matter, see IMG_0810_n.jpg
 Clean-Room Table on frontside not included
 Original Lower Machine Front Panels not included (below the Table)
 Rough-Pumps not included
 Endstation Flowhood not included
 Disk-Chiller not included
 modified Plasma-Gun Power-Supply installed(TDK)
 Minor modifications on tool
 No Manual-Set/ no Spares
 If required, tool can be inspected on site
1  
238643

PVA TePla  

TWIN 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

1  
255371

Suss MicroTec  

ACS200 Gen3 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

InkJet Printer (Süss ACS200):

Süss Micro Tec ACS200 Gen 3

1   N*
255827

LAM Research Corp.  

2300 Kiyo 

List all items of this typeCluster Plasma Tools - Oxide

in Cluster Plasma Tools

Lam Kiyo Chamber L2301-B:

Semiconductor ETC Chamber with RF Cart

Incl. Gasbox and Rocker Valve

in production until January 2023
1   N*
239644

Ramgraber  

SST 

List all items of this typeSolvent Wet Stations

in Wafer Cleaners

Ramgraber SST:

Used Configuration:

Tank 1: EKC

Tank 2: P1331

Tank 3 and 4: DMF

Tank 5: IPA

Known errors:

Filter from tank 4 is leaking

Heater 1 from tank 4 is broken

Heater 3 from tank 4 is broken

1   F*
255447

Speedfam  

Auriga C 

List all items of this typeCMP Polishers

in Chemical Mechanical Planarization Equipment

Speedfam Auriga C:


Oxid Prozess
Wafer edge cleaner,
EVCII PC, SW 8.601
Conditioner new type
Flowcontroller für Slurry #2,
additional Carrier rinse option
CLC DI and chemical option at Wafer cleaner station

1   N*
252586

LAM Research Corp.  

SEZ SP 203 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

Spin Etch Tool (8''tool):

Spin Etch Tool (8''tool)

1  
250488

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A1
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 Last Time in production 1/1/24

 

1  
250489

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

Last Time in production 1/1/24

 

1  
250490

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#1
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Semifab CD200
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

1  
250491

Tel  

MK7-S 

List all items of this typeLithography Equipment - Other

in Lithography Equipment

TEL MK7-S Coater_Developer:

missing parts: 2 resist pumps, 1Developer Line

 

Add. Info:

TYP A
M/C Typ FC-9801F#2
SD/HD Typ Commandpost
System Vers. MK8G2.38
Alarm File ALM00166.OEN
Sp. Al.File AL00TT.OEN
GEM 1.72
Lines 1(3)
Pumps 1xmini
EBR programable
T/H-Controller Shinwa CP-I
Backrinse yes
Lines 1 x H-Nozzle
Rinse yes
Backrinse yes

 

Last time in production: 01.01.24

1  
237878

Accretech  

UF3000EX-e 

List all items of this typeWafer Fabrication Equipment - Other

in Wafer Fabrication Equipment

TSK-Prober 209:

Probertyp

UF3000EX-e

Hinge Manipulator

No

Type of tester head plate

Agilent

Prober power supply rate

230V

Chuck Type (Nickel, Gold, etc.)

Gold, Plane, Bernoulli

  

Network/connection

Yes

APCC Auto Probe Card Changer

No

Top Side Handling

Yes, V1 mit Bernoulli

Cleaning pad module

Yes

The Prober is sold without the hinge!! (marked red in the picture)

1  
250971

AP&S Customized Soln  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean Strip (8''tool):

WET Clean Strip (8''tool)

1  
250972

AP&S Customized Soln  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean Strip (8''tool):

WET Clean Strip (8''tool), Currently the tool still working.

1  
253558

Tel  

 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET Clean with Ultrasonic Cleaner 8'':

WET Clean with Ultrasonic Cleaner 8''

1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.