Item ID: 257523 1 Offered at Best Price EPI 39 - AMAT EPI CENTURA Software Ver: B6.50CB1 Amps: 300AVita ControllerFlow Point Model: Nano ValveGas Panel Type: ConfigurableWafer Size: 200mm (with conversion kit 150mm is possible)M-Monitor: CRT3 Chambers ATM EPIWith digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC) Standard pneumatic waferliftCenter Finding System: OTFBuffer robot: HP+Piezocon sensor: NoVSB: YesWide Body LLTool called "EPI39" ... other images Unit Price Unstated Number of Units 1 Manufacturer AMAT Model AMAT EPI CENTURA Wafer Size Range Minimum 150 mm Maximum 200 mm Set Size 150 mm Number of Chambers 3 Controller Type Other Controller Type Cassette to Cassette YES Extended Description Details at Konfiguration und Part list EPI39.xlsx Power Requirements 480 V 120.0 A 50 Hz 3 Phase Year of Manufacture 2006 Condition Good Serial Number(s)20613 Shipping & Handling:All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment. Payment:100% downpayment Make OFFERSend QUESTIONS
Software Ver: B6.50
CB1 Amps: 300A
Vita Controller
Flow Point Model: Nano Valve
Gas Panel Type: Configurable
Wafer Size: 200mm (with conversion kit 150mm is possible)
M-Monitor: CRT
3 Chambers ATM EPI
With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)
Standard pneumatic waferlift
Center Finding System: OTF
Buffer robot: HP+
Piezocon sensor: No
VSB: Yes
Wide Body LL
Tool called "EPI39"
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
ALL CATEGORIES Wafer Fabrication Eq Chemical Vapor Dep Epitaxial Reactors
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