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in Epitaxial Cluster Tools
Item ID: 209404

Offered 1 Offered at Best Price

EPI Centura HTF

3 Chambers Atmospheric

Logitex Wafer Handling Control

Cooling Circuit with digital Flowmeters Controlled by PLC

Door Interlocks also controlled by PLC

Tool in fully production



EPI Centura HTF
  Click to see additional image(s)... other images
Unit Price Unstated
Number of Units 1
Manufacturer Applied Materials
Model HTF Atmospheric
Number of Chambers 3
Chamber 1 Description 

Standard EPI Atmospheric Chamber

Chamber 2 Description 

Standard EPI Atmospheric Chamber

Chamber 3 Description 

Standard EPI Atmospheric Chamber

Controller Type PC Controller Type
Temperature Control Dual Pyrometer
Process Gases TCS, PH3, Porr,
External Cooling Water Cooled
Power Requirements 480 V     240.0 A     50 Hz     3 Phase
CE Marked YES
Year of Manufacture 2006
Condition Excellent
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Serial Number(s)


Shipping & Handling:

All Items are sold FCA Infineon location excluding packaging and delivery. We are not responsible for any damage incurred during shipment.

100% downpayment