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FULL DESCRIPTION of Item 255558

in Unpatterned Wafer Inspection
Item ID: 255558

Offered 1 Offered at Best Price


KLA Surfscan 6420

›Automatic Surface Inspection System

›Bare Wafer Surface Defect Inspection System

›Substrate/Sizes: 6" and 8" Wafer Capable

›Thickness: SEMI Standard Wafer Thickness

›Throughput: 100 wph (200 mm) at 0.12 mm

›Illumination Source: 30 mW Argon-Ion laser, 488 nm Wavelength

KLA Surfscan 6420
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Unit Price Unstated
Number of Units 1
Manufacturer KLA Tencor
Model Surfscan 6420
Description Automatic Surface Inspection System
Other Information 

›Vaccum:   6mm (0.25 in.) line – 500mm (20 in.) of Hg / flow rate 0.24 l/s

›Ducted Venting:  two 100mm (4 in.) exhaust hoses

›Power:  200-240V, 50/60 Hz, 2kVA

Environment:  ≥Class 10  

Condition Very Good
Year of Manufacture 1996
Power Requirements 200-240 V     50 Hz
Exterior Dimensions 
  Width 29.921  in  (76.0 cm)
  Depth 40.945  in  (104.0 cm)
  Height 66.142  in  (168.0 cm)
Weight 728  lb  (330 kg)
Shipping  Weight lb  kg 

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment