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in Horizontal LPCVD Furnaces
Item ID: 249305

Offered 1 Offered at Best Price

ATV PEO 603 tube furnace

This furnace can handle wafers up to 150mm


N2 -  1500 l/min

N2 -    660 l/min

Forming Gas 660l/min

Temperature Control 0°C – up to 500°C max.

Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)

Stainless Steel Calotte 0 – 5kg

ATV PEO 603 tube furnace
  Click to see additional image(s)... other images
Unit Price Unstated
Number of Units 1
Manufacturer ATV Technologie GmbH
Model PEO603
Wafer Size Range 
  Minimum 50 mm
  Maximum 150 mm
  Set Size 150 mm
Number of Furnace Tubes 1
Furnace Tube #1:
Process AU sintering
Other Information 

used for a AU-process 

CE Marked YES
Year of Manufacture 1999
Condition Good
Serial Number(s)47

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.


100% downpayment