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FULL DESCRIPTION of Item 225309

in Oxide Etchers
Item ID: 225309

Offered 1 Offered at Best Price


Lam Rainbow 4520i

LAM3D

Oxid Etch Tool with Isotropic Etch chamber.

Lam Rainbow 4520i
  Click to see additional image(s)... other images
Unit Price Unstated
Number of Units 1
Manufacturer LAM Research Corp.
Model 4520i
Wafer Size Range 
  Minimum 150 mm
  Maximum 200 mm
  Set Size 200 mm
Process Oxid Etch
Isotropic Etch Processing YES
Software Revision Level E-1.5.2
End Point Detection Monochromatic Endpoint
Cassette to Cassette YES
High Vacuum Pump No
Roughing Pump No
Chillers 
  Number of Chillers 1
  Chiller #1Manufacturer/Model LAM TCU 2080
Accessories 

Mainframe, Chiller TCU, RF Cart

Other Information 

Upgrade to VAT Throttle Valve

Year of Manufacture 1999
Condition Very Good
Serial Number(s)2543

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment