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in CMP Polishers
Item ID: 221092

Offered 1 Offered at Best Price


Tool complete (except former Nova Measurement Unit), “Jigs and Tools" package missing

“NOVA readiness” integration

Wafer size 12"

Last time in production 04/2021. Tool still powered but ready for de-installation

Manuals available

Spare Parts partly available

OEM refurbished demo tool

Manuals digital available

Many extensions. E.g. Nova Ready, IPA dryer, SOPM Platen A, RECM Platen C)

We see the fair market value around 470k$ (as and where is) and would be happy for every offer between 380k$ and 525k$. The tool will be sold for the highest offer.


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Unit Price Unstated
Number of Units 1
Manufacturer Ebara
Model FREX300S
Wafer Size Range 
  Set Size 300 mm
Other Information 

Date of first usage 2004. Tool was a demo Tool at Ebara

Installation at Infineon after OEM refurbishment in 2015    

Tool can require Maintenance attention: PLC3 (cleaner) communication issues; Spinner Cover Dom

OEM Serial ID:  PGA31036WV

During the production processes the Equipment had regular standard contact with ammoniac, isopropyl, H202 4%, K30N50, Optiplane 4002, Polyslurry. Tool is decontaminated. Internal protocols existing.

Year of Manufacture 2004
Condition Good

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.


100% downpayment