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in Epitaxial Cluster Tools
Item ID: 217059

Offered 1 Offered at $ 395,000.00

Epi LPE PE3061D


Epi tool for Epi Layers from 0 until 120µ thickness

One Chamber for 5 Wafers

Spares in value of ~49k$ included

Epi LPE PE3061D
  Click to see additional image(s)... other images
Unit Price $ 395,000.00
Number of Units 1
Manufacturer LPE
Model PE3061D
Wafer Size Range 
  Minimum 150 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Chambers 1
Chamber 1 Description 

Water cooled gold chamber

External Cooling Water Cooled
Power Requirements 230 V     50 Hz     3 Phase
CE Marked YES
Year of Manufacture 2011
Condition Like New
Serial Number(s)


Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.


100% downpayment