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in Other Lithography Equipment
Item ID: 205023

Offered 1 Offered at € 95,000.00

Axcelis Fusion PS3


UV Bake, UV Harden / Photostabalizer


With 2 Chambers UV bake.

Axcelis Fusion PS3
  Click to see additional image(s)... other images
Unit Price € 95,000.00
Number of Units 1
Manufacturer Axcelis Technologies
Model Fusion PS3
Wafer Size Range 
  Minimum 200 mm
  Maximum 300 mm
  Set Size 300 mm
Cassette to Cassette YES
Condition Good
Year of Manufacture 2002
Power Requirements 208 V     30.0 A     80.0 A(2)     60 Hz     1 Phase
Serial Number(s)


Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.


100% downpayment