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in Patterned Wafer Inspection
Item ID: 222197

Offered 1 Offered at Best Price

KLA Tencor 2135

KLA Tencor 2135 

This one was original a 2115 and experienced a upgrade to a 2135.

 Tool still  in cleanroom under power. The Equipment was under full KLA Service Contract up to now.


› Ready for delivery:

5 Weeks after mutual sales contract signature

› Current Condition:

Very good, in Production until now

› Completeness:

Tool complete, no parts missing

› Manufacturing date

May 1997

› Correct maintained?

In KLA Contract until 02/20

› Manuals existing?


› Current location

Cleanroom until 08 2021

› Any upgrades / extensions?

Yes, KLA 2135

› Wafer size (if applicable)?

2x 8 inch

› Was there a significant system failure in the last three years?


› Used: 7_24 / 8 hours a working day / for development /rarely?

Used 24/7

› Any contaminations known?



KLA Tencor 2135
  Click to see additional image(s)... other images
Unit Price Unstated
Number of Units 1
Manufacturer KLA Tencor
Model 2115 upgraded 2135
Description Mask and waferinspection
Cassette to Cassette YES
Condition Very Good
Year of Manufacture 1997
Power Requirements 208 V     10.0 A     30.0 A(2)     50/60 Hz     3 Phase
CE Marked YES
click to view document at right in new windowLarge picture collection
Serial Number(s)W21XX960

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.


100% downpayment