-MCINV8201

› Original Equipment Manufacturer? Axcelis

› Exact Model Type? AXCELIS MEDIUM CURRENT NV8200

› OEM Serial ID?

› Current Condition: Excellent/Very good/Good/poor/Very poor : Good. Just is the tool already cold steel. Power cut off to the tool.

› Completeness: Total/partial/Donor tool? Please list missing parts.  95 percent complete. Only few items were taken example the turbo pump controllers.

› Manufacturing date of the Equipment ?

› Date of first usage? 2006

› Technic special customized for Infineon? We don’t use water cool for the platen.

› Correct maintained? Yes.

› Any damages/deficits known? No

› Manuals existing? Yes.

› Crated: If yes…/ professional with protocol / partly / simple? Not yet crated. Tool still not dissembled.

› Any upgrades / extensions? No.

› Useable for which products? 8 inch product

› Wafer size (if applicable)? 8 inch

› Any consumables at end of lifetime? Yes. Few pars already end of lifetime as per Manufacturer.

› Procured from OEM or from second hand? Second hand.

› Any refurbishments done? No.

› Any doubts that the tool is failure free useable for the next three years? No.

› Was there a significant system failure in the last three years? No.

› Any contaminations known? No

› IFX Inventory number? 100000605