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Your search for Manufacturer: LAM Research Corp.
found:
  • 4 Listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
   
236924

LAM Research Corp.  

TCP 9600 

List all items of this typeMetal Etchers

in Single Chamber Plasma Tools

1   N*
226452

LAM Research Corp.  

RST304 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

LAM SEZ RST304:

SP304 - SN0947

300mm / 12" Equipment

Chuck STD

Brooks ATM407 w Flip-Module

Medium1
used for HF HouseSupply,
able to mix DHF
Mix-Tank,
Buffer-Tank (10ml BP) for HF,
PW for DI
Single-Hex

Medium2
used for DSP from CBM
able to mix DHF
NO Mixtank !
Buffer.Tank (10ml) HF (not used)
PW for DI
Double-Hex

Medium3
used for SED HouseSupply
NO Mixtank
Buffer-Tank(10ml) HF
Double-Hex

CBM
3 BufferTanks (H2SO4/H2O2/HF)
1 PW (DI)

Ozon-DIW
Modul is not functional, components removed/defective
- O3-generator removed
- O3-contactor defective
- ctrl-cabinet some parts(solenoid block)

Tool is located in Dresden, Germany.

Planned de-installation date is 1st September 2022. 

1  
235336

LAM Research Corp.  

SP 203 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

WET CLEAN/STRIP/ETCH:

Lam SP 203 clean/strip/etch tool

Tool consists of main unit and 3 chemistry cabinet's

Chemistry is currently one floor above the tool and there are additional tanks and pumps in the tool.

Tool is still in production (deinstall around 5.2023)

1  
236923

LAM Research Corp.  

RST304 

List all items of this typeWet Process Equipment - Other

in Wet Processing Equipment

1   N*

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.