LAM SEZ RST304:SP304 - SN0947
300mm / 12" Equipment
Chuck STD
Brooks ATM407 w Flip-Module
Medium1
used for HF HouseSupply,
able to mix DHF
Mix-Tank,
Buffer-Tank (10ml BP) for HF,
PW for DI
Single-Hex
Medium2
used for DSP from CBM
able to mix DHF
NO Mixtank !
Buffer.Tank (10ml) HF (not used)
PW for DI
Double-Hex
Medium3
used for SED HouseSupply
NO Mixtank
Buffer-Tank(10ml) HF
Double-Hex
CBM
3 BufferTanks (H2SO4/H2O2/HF)
1 PW (DI)
Ozon-DIW
Modul is not functional, components removed/defective
- O3-generator removed
- O3-contactor defective
- ctrl-cabinet some parts(solenoid block)
Tool is located in Dresden, Germany.
Planned de-installation date is 1st September 2022.