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	View All Offers Under LPCVD Tools » Switch Major Category		Click an item's ID# below for its full specifications , or: Group Offers into sub-categories under LPCVD Tools List all 3 product types under LPCVD Tools

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Item ID  Short Description Product Type / Details # Price Notes Make Model     242019 ATV Technologie GmbH   PEO 602  Horizontal LPCVD Furnaces in LPCVD Furnaces ATV PEO 602 tube furnace: This furnace can handle wafers up to 150mm Configuration: N2 -  1500 l/min N2 -    660 l/min Forming Gas 660l/min Temperature Control 0°C – up to 500°C max. Free Ramping (up to 99 steps max., one step up to 99,99 °C max.) Stainless Steel Calotte 0 – 5kg 1   242018 ATV Technologie GmbH   PEO 603  Horizontal LPCVD Furnaces in LPCVD Furnaces ATV PEO 603 tube furnace : This furnace can handle wafers up to 150mm Configuration: N2 -  1500 l/min N2 -    660 l/min Forming Gas 660l/min Temperature Control 0°C – up to 500°C max. Free Ramping (up to 99 steps max., one step up to 99,99 °C max.) Stainless Steel Calotte 0 – 5kg 1

*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

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