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FULL DESCRIPTION of Item 231620

in Horizontal Diffusion Furnaces
Item ID: 231620

Offered 1 Offered at Best Price


Furnance BDF-41 Ofen 28B

Diffusion Furnance for atmospheric oxid processes.

Tool is productive in use until 27.06.2022

Furnance BDF-41 Ofen 28B
  Click to see additional image(s)... other images
Unit Price Unstated
Number of Units 1
Manufacturer Bruce (BTI)
Model DSVA 24
Wafer Size Range 
  Minimum 150 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Furnace Tubes 4
Furnace Tube #1:
Process P-Diff
Gas System 
  Gas Input Control Mass Flow Controllers
  Process Gases N2, O2, HCL, H2
Furnace Tube #2:
Process Bor-Diff
Gas System 
  Gas Input Control Mass Flow Controllers
  Process Gases N2, O2, HCL, H2
Furnace Tube #3:
Process BPSG
Gas System 
  Gas Input Control Mass Flow Controllers
  Process Gases N2, O2, HCL, H2
Furnace Tube #4:
Process Tempern
Gas System 
  Gas Input Control Mass Flow Controllers
  Process Gases N2, O2, HCL, H2
Gas Cabinet YES
Loading Station YES
Controller Manufacturer/Model DDC
Maximum Temperature 1,150  ºC  (2,102 ºF, 1,423 ºK)
Minimum Temperature 600  ºC  (1,112 ºF, 873.00 ºK)
Number of Control Zones 5
Overtemperature Protection YES
Year of Manufacture 2001
Condition Good
Serial Number(s)DSVA-24

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment