Item ID: 245275 1 Offered at Best Price AMAT EPI CENTURA HTF (EPI5) Software Ver: B6.30CB1 Amps: 300ASBC Type: V452Flow Point Model: Nano ValveGas Panel Type: ConfigurableWafer Size: 200mm (with conversion kit 150mm is possible)M-Monitor: CRT3 Chambers ATM EPIWith digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)HDD was upgraded to RAID SystemTool called "EPI5" ... other images Unit Price Unstated Number of Units 1 Manufacturer Applied Materials Model EPI5 Wafer Size Range Minimum 150 mm Maximum 200 mm Set Size 200 mm Number of Chambers 3 Process Capabilities ATM EPI PROCESS Chamber 1 Description HTF ATM EPI Chamber 2 Description HTF ATM EPI Chamber 3 Description HTF ATM EPI Controller Type Microprocessor Controller Type Software Revision Level B6.30 Temperature Control Dual Pyrometer Extended Description Details at FEP_Core_Inspection_Checklist_REV_D_IFX_Villach_Epi5_6137_no_pics.xlsx Power Requirements 480 V 300.0 A 50 Hz 3 Phase Year of Manufacture 1996 Condition Good Serial Number(s)6137-Q4-1996 Shipping & Handling:All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment. Payment:100% downpayment Make OFFERSend QUESTIONS
Software Ver: B6.30
CB1 Amps: 300A
SBC Type: V452
Flow Point Model: Nano Valve
Gas Panel Type: Configurable
Wafer Size: 200mm (with conversion kit 150mm is possible)
M-Monitor: CRT
3 Chambers ATM EPI
With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)
HDD was upgraded to RAID System
Tool called "EPI5"
HTF ATM EPI
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
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