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Chemical Vapor Deposition Equipment


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Group Offers into sub-categories under Chemical Vapor Deposition EquipmentGroup Offers into sub-categories under Chemical Vapor Deposition Equipment

List all 11 product types under Chemical Vapor Deposition EquipmentList all 11 product types under Chemical Vapor Deposition Equipment


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 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes
Make Model
   
245275

Applied Materials  

EPI5 

List all items of this typeEpitaxial Cluster Tools

in Epitaxial Reactors

AMAT EPI CENTURA HTF (EPI5):

Software Ver: B6.30

CB1 Amps: 300A

SBC Type: V452

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

HDD was upgraded to RAID System

Tool called "EPI5"

1  
218746

Applied Materials  

P5000 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Amat P5000 CVD Tool:

P500048

8 inch tool with 4 CVD chambers.

Tool still in Production until (Planned until 3.23) 

1  
242019

ATV Technologie GmbH  

PEO 602 

List all items of this typeHorizontal LPCVD Furnaces

in LPCVD Furnaces

ATV PEO 602 tube furnace:

This furnace can handle wafers up to 150mm

Configuration:

N2 -  1500 l/min

N2 -    660 l/min

Forming Gas 660l/min

Temperature Control 0°C – up to 500°C max.

Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)

Stainless Steel Calotte 0 – 5kg

1  
242018

ATV Technologie GmbH  

PEO 603 

List all items of this typeHorizontal LPCVD Furnaces

in LPCVD Furnaces

ATV PEO 603 tube furnace :

This furnace can handle wafers up to 150mm

Configuration:

N2 -  1500 l/min

N2 -    660 l/min

Forming Gas 660l/min

Temperature Control 0°C – up to 500°C max.

Free Ramping (up to 99 steps max., one step up to 99,99 °C max.)

Stainless Steel Calotte 0 – 5kg

1  
223074

Novellus Systems  

Concept Two SPEED 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Novellus Concept Two SPEED (shrink):

1 Mainframe w/ 3 Chambers 

Damages/Deficites: Chamber Turbo Pumps & HF/LF Generators 
EOL: Turbo Pumps

 

no significant failures between last 3 years

1  
238827

Applied Materials  

P5000 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

P5000:

From Chamber B following Parts are missing:

  1. RF Generator
  2. RF Match
  3. Baratron
  4. Turbo/Controller

Chamber B,C,D are universal CVD etch chambers.

1  
240853

Applied Materials  

P5000 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

P5000:

4x Standard SNIT Chambers

1  
242656

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

P5000:
CHAMBER A Universal CVDTeos
CHAMBER B Universal CVDTeos
CHAMBER CMark2Etch
CHAMBER DMark2Etch

The Tool is sold with 4 chambers and was productiv until August 2023

1  
242682

Applied Materials  

P5000 

List all items of this typeCluster PECVD Tools

in Production Tools

P5000:
CHAMBER A x Universal CVDTeos
CHAMBER B x Universal CVDTeos
CHAMBER Dx Universal CVDTeos

Tool is sold with three chambers and was used in cleanroom until August 2023

1  


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
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   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.