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Manufacturer
Model
Wafer Size Range Minimum
Wafer Size Range Maximum
Wafer Size Range Set Size
Number of Tracks
Number of Scrub Stations
Number of Cassette Elevators
Wafer Handling
High Pressure Spray
Scrub Brush
Megasonic Nozzle
Fl Delivery Channels Number of Channels
Fl Delivery Channels Ammonia Hydroxide
Fl Delivery Channels Surfactant
Fl Delivery Channels Detergent
Fl Delivery Channels IPA
Fl Delivery Channels Solvent
Fl Delivery Channels DI Water
Reionizer
IR Heat Lamp
Controller Type
Software Revision Level
External Cooling
Accessories
Other Information
Extended Description
Power Requirements Voltage
Power Requirements Amps
Power Requirements Frequency
Power Requirements Phase
Operating Air Pressure
Air Consumption
Cooling Water Reqd Minimum Flow
Cooling Water Reqd Minimum Temperature
Cooling Water Reqd Maximum Temperature
Vacuum Required
CE Marked
Year of Manufacture
Refurbished
Condition
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height
Weight