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Robotic PR Coater Tracks
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Wafer Size Range Minimum
Wafer Size Range Maximum
Wafer Size Range Set Size
Photoresist Type
Number of Robots
Number of Cassette Elevators
Number of Photoresist Coat Stations
Number of Photoresist Dispenses
Wafer Edge Bead Removal
Wafer Backside Rinse
Bowl Rinse
Number of Wafer Edge Exposure Stations
Number of Vapor Prime Hot Plates
Number of Vapor Prime Chill Plates
Number of Hot Plates
Number of Chill Plates
Stepper Interface
Interface Type
Controller Type
Software Revision Level
External Cooling
Other Information
Extended Description
Power Requirements Voltage
Power Requirements Amps
Power Requirements Amps 2
Power Requirements Frequency
Power Requirements Phase
Operating Air Pressure
Air Consumption
Cooling Water Reqd Minimum Flow
Cooling Water Reqd Minimum Temperature
Cooling Water Reqd Maximum Temperature
Vacuum Required
CE Marked
Year of Manufacture
Exterior Dimensions Width
Exterior Dimensions Depth
Exterior Dimensions Height