Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Photoresist Type Number of Tracks Number of Cassette Elevators Number of Developer Dispensers Number of Developer Rinse Dispensers Wafer Backside Rinse Bowl Rinse Number of Hot Plates Number of Chill Plates
| Controller Type Software Revision Level Mini-Environment Refurbished Accessories Other Information Extended Description Year of Manufacture Condition Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase
| CE Marked External Cooling Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Operating Air Pressure Air Consumption Vacuum Required Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight
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