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Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Process Capabilities Number of Cassette Platforms Robot Manufacturer/Model Controller Manufacturer/Model Software Revision Level Interface Maximum Temperature Minimum Temperature Number of Control Zones	Flat Zone Length Overtemperature Protection Process Gases Accessories Other Information Extended Description Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature	CE Marked Year of Manufacture Refurbished Condition Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight External Cooling Air Consumption Operating Air Pressure Vacuum Required