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FULL DESCRIPTION of Item 265095

in Cluster Plasma Tools - Poly/Nitride
Item ID: 265095

Offered 1 Offered at Best Price


AMAT P5000 XT (Poly - Trench)

The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.The tool offered is already in storage. The three images are from an identical system that is still in operation. The tool in storage was dismantled correctly and is stored optimally.

 

Tool facts:

Applied Material P5000XT

-top mount elektronics and He backing

-2 Chamber Narrow Gap tool

-installed pos. Chamber A/B

-Standard Phase 3 Robot

-15 slot storage elevator

-ZA Slit Valves pos. A/B

-Wafer Positioning Sensor (WPS)

-Cassette loadport with 2 stages

-2 Monitor

-System SSD

-CF card Floppy emulator

 

-MXP Unibody chamber with Narrow Gap lid

-Turbo Seiki STP-301CVB

-Controller Seiki SCU-350D

-MKS Manometer

-7 Gas Sticks / Brooks GF 100 MFCs

-Gas: Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4

 

-2x AMAT 1 heat exchanger / Stainless Steel hoses (50ft)

-2x ENI OEM 12B RF generators

-AC Box at RF Rack

AMAT P5000 XT (Poly - Trench)
  Click to see additional image(s)... other image
Unit Price Unstated
Number of Units 1
Manufacturer Applied Materials
Model P5000 XT
Wafer Size Range 
  Minimum 200 mm
  Set Size 200 mm
Number of Chambers 2
Process Capabilities 2x MXP Narrow Gap Pos. A/B
Process Gases Hbr, NF3, NF3-2, N2, He/O2, Ar, CF4
Accessories 

see description

Other Information 

see description

Power Requirements 208 V     50.0 A     50/60 Hz     3 Phase
Year of Manufacture 1999
Refurbished YES
Condition Very Good
Weight 2,205  lb  (1,000 kg)
Shipping  Weight lb  kg 
Serial Number(s)tbd

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment