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FULL DESCRIPTION of Item 255827

in Cluster Plasma Tools - Oxide
Item ID: 255827

Offered 1 Offered at Best Price


Lam Kiyo Chamber L2301-B

Semiconductor ETC Chamber with RF Cart

Incl. Gasbox and Rocker Valve

in production until January 2023
 Lam Kiyo Chamber L2301-B
  Click to see additional image(s)... other images
Unit Price Unstated
Number of Units 1
Manufacturer LAM Research Corp.
Model 2300 Kiyo
Wafer Size Range 
  Minimum 200 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Chambers 1
Process Capabilities Plasma Etch
Chamber 1 Description 

dual zone ESC

Controller Type VME
Temperature Control Single Pyrometer
External Cooling Water Cooled
Accessories 

 Rocker Valve for Installation on V2 Mainframe

16 Slot Gasbox

Power Requirements 100-240 V     41.0 A     50/60 Hz
Cooling Water Required      Minimum Temperature: 10  ºC  (50 ºF, 283.00 ºK)     Maximum Temperature: 50  ºC  (122 ºF, 323 ºK)
CE Marked YES
Year of Manufacture 2008
Condition Good
Serial Number(s)23KYO978A(F113640-PM2)

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment