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Item ID: 259153

1 Offered at Best Price CAI519 Canon FPA 3000 i5+ Canon FPA 3000 i5+ General Configuration: FPA 3000 - i5(+) Manufactured in  June / 1997 8“ Wafer Chuck, Notch PA unit 6“ Nikon-type Reticle Changer Reticle Barcode-Reader =   yes Cassette Barcode Reader = yes Pellicle Particle Checker =   yes Online - ESPA =   yes Interface type:   right Standard flys eye lens Chamber type: CD80   ... other images

Unit Price	Unstated
Number of Units	1
Manufacturer	Canon
Model	CAI519
Description	Canon FPA 3000 i5+
Wafer Size Range
Minimum	150 mm
Maximum	200 mm
Set Size	200 mm
Cassette to Cassette	YES
Other Information	Currently exchanged items ( 2023-2025)  :   Illumination Shutter Stage Laser Cooling Coil Chamber Wafer Feeder Roboter UPS for Workstation     Uniformity  /  Illumination Data at Lamp hrs 712 h :     uc0:6308   li0:7299   iucVal:2.804  maxVal:105.760 minVal:99.992 areaX:22.0000 areaY:26.0000 pitchX:2.2000 pitchY:2.6000 count:100   Special Illumination  Mode 1          Lens NA   0.54    Multiple Stopper       sigma   0.77          1st zoom  22.30 [%] input lens none           2nd Zoom          Compensator 2 Value     Direction            0.0 [%]                      44.0 [%]  -97.5 [degree]
Condition	Good
Year of Manufacture	1997
Power Requirements	50/60 Hz     3 Phase
Weight	3,406  lb  (1,545 kg)
Serial Number(s)	CD83704116-A

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 

Payment:

100% downpayment

 

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