Item ID: 257675 1 Offered at Best Price Cluster Tool: TEL ACT12 + Canon FPA- 5500iZ TEL ACT12 - Double Block - 300mm + LITVC1-02 ... other images Unit Price Unstated Number of Units 1 Manufacturer Canon Model LITVC1-02 Description Canon FPA- 5500iZ+ Wafer Size Range Minimum 300 mm Maximum 300 mm Set Size 300 mm Other Information Block 2: - 4x Coater Unit (IC Cup) - 4 Resist Lines / coater Unit - 11 Resist pumps "RGEN01" with Entegris Filter Manifold - 1x RRC / EBR nozzle / coater unit - Back Rinse Nozzle standard - 2x adhesion (ADH) unit - 5x chill plate (CPL) - 6x standard hot plate (LHP) - 3x high temperature hot plate (HHP) - 2x Cup wash holder unit incl. Cup wash disc - 1x Transfer unit (TRS) - 1x Transfer chill plate (TCP) Block 3: - 4x Developer unit - 2 Developer Lines (SH - Nozzle) / unit - 1x Rinse Nozzle / unit - Back Rinse Nozzle standard 3x chill plate (CPL) 4x chilling hot plate (CHP) 5x standard hot plate (LHP) Interface Block - connection Canon iZ Stepper - 1x WEE unit - 2x Buffer station - 1x chill plate (CPL) Extended Description Details at Configuration_overview_LITVC1-02_ACT12_E200052_010325.xlsx Condition Good Year of Manufacture 2004 Power Requirements 200-208 V 50/60 Hz 3 Phase CE Marked YES Serial Number(s)CD16049R131 Shipping & Handling:All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment. Payment:100% downpayment Make OFFERSend QUESTIONS
TEL ACT12 - Double Block - 300mm + LITVC1-02
All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge, packaging, crating and delivery. We are not responsible for any damage incurred during shipment.
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