AMAT HDP Centura (#611)
Software: Win 10 ; OR 4000 WTM Controller; 3x ENI Generator Racks, Chiller INR-498-011D; 2x Remote Monitor; High Density Plasma Process; Process Chambers: A,B,D; Orienter chamber F;Software: Win 10 ; OR 4000 WTM Controller; 3x ENI Generator Racks, Chiller INR-498-011D; 2x Remote Monitor; High Density Plasma Process; Process Chambers: A,B,D; Orienter chamber F;
1 unit @ Best Price
MAKE: AMAT
MODEL: Centura HDP
CATEGORY: Cluster PECVD Tools
Regensburg, Germany
SPECS
| Manufacturer | AMAT |
| Model | Centura HDP |
| Wafer Size Range | |
| Set Size | 200 mm |
| Number of Chambers | 3 |
| Process Gases | PH3, SiH4, NF3, He, Argon, O2 |
| Other Information | System: 1x Mainframe; 3x process chamber; 1x Controller Rack; 1x Chiller; 3x ENI Generator Racks (Converted to separate water supply each Generator)System: 1x Mainframe; 3x process chamber; 1x Controller Rack; 1x Chiller; 3x ENI Generator Racks (Converted to separate water supply each Generator) AMAT Vita/Delphin Controller; Tool will be sold without SoftwareAMAT Vita/Delphin Controller; Tool will be sold without Software |
| Power Requirements | 208 V 100.0 A 50/60 Hz 3 Phase |
| CE Marked | YES |
| Year of Manufacture | 1999 |
| Refurbished | YES |
| Condition | Good |
| Exterior Dimensions | |
| Width | 1,056.693 in (2,684.0 cm) |
| Depth | 986.220 in (2,505.0 cm) |
| Height | 944.882 in (2,400.0 cm) |
| Weight | 3,748 lb (1,700 kg) |