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FULL DESCRIPTION of Item 265335

in Other Wet Process Equipment
Item ID: 265335

Offered 1 Offered at Best Price


SP203 (6'')

SP203 Mainunit: 6 Inch Bernoulli Handling; Pinlesschuck 6 Inch; Exhaust Up; 1 Medium Double Hex; 2 Medium Single Hex; Software: Major Version 117; Minor Version 2015.08.21; Gem Version GEM 5.8;

3 Chemistry Cabinetts: Cabinett 1: Maintank and Buffertank; Cabinett 2: Maintank and Buffertank; Cabinett 3:

Maintank; Chemistry Controller-Dos

Wafer Size Range

Minimum: 150 mm

Maximum:150 mm

Set Size: 150 mm

Problems: Keyboard switching; voltage fluctuations; chemistry-cabinets heavily used; chemistry computer not original; modifications; FFU controller; 1 cabinet drain box repaired;

  • No Spare Parts available
  • dismantling date: We can dismantle the tool in May 2026 
  • Expected date of availability for the buyer: July 2026
SP203 (6'')
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Unit Price Unstated
Number of Units 1
Manufacturer SEZ
Model SP203 (SM202-6-B)
Description SP203 with 3 Chemisty Cabinets
Accessories 

ISIS Controller (2.0.0.06.38-0159) and Measuring head (SN 2.0.0.07.14_01557)

Cables are no longer available.

Other Information 

 The Tool was modified to allow the chemistry to be applied over it

Power Requirements 200-208 V     50.0 A     50/60 Hz     3 Phase
Year of Manufacture 1998
Condition Fair
Serial Number(s)00309

Shipping & Handling:

All items are sold on condition `as is and where is`. Ex work from current location excluding de-installation, de-hook up, discharge,  packaging, crating and delivery. We are not responsible for any damage incurred during shipment.

 
Payment:

100% downpayment