Item ID: 265334

**1 Offered at Best Price**

SP304 (8'')

SP304 Mainunit: The system is equipped with 8-inch Bernoulli handling, Frontside and Backside (implemented by PTW) with Pinlesschuck and Pinchuck; Cold DI in Nozzle; Hot DI in Dispenser; exhaust up; heat exchangers: 1x double hex with Lauda for Di, 1x double hex with Lauda for Medium 2; 1x single hex with Lauda for Medium 1 (not used), 1x single hex with Lauda for Medium 3;

Chemistry: 2 cabinets with Maintank and Buffertank and with Mixtank with 3 Paddle wheels to fill and with Pressure regulator for the facility lines; with a Drainpumpstation.

Problems: Chemistry cabinets are used; some parts in the tool are corroded; the tool has been repaired and converted to Bernoulli handling by PTW; software adjustments have been made.

Wafer Size Range:

Minimum: 200mm

Maximun: 200mm

Set Size: 200mm

No Spare Parts available
dismantling date: We can dismantle the tool in June 2026
Expected date of availability for the buyer: August 2026

... other images

Unit Price	Unstated
Number of Units	1
Manufacturer	SEZ
Model	SP304
Description	SP304 with 2 Chemistry Cabinets (8'')
Accessories	Drainpumpstation for 2 chemistry cabinets and Handlingsmodification from PTW To Bernoulli-Handling;
Refurbished	YES
Power Requirements	Other V 32.0 A 50/60 Hz 3 Phase
Year of Manufacture	2002
Condition	Fair
Serial Number(s)	00625

FULL DESCRIPTION of Item 265334

1 Offered at Best Price

SP304 (8'')

**1 Offered at Best Price**